Inventor · disambiguated record
Shinji Yashima
Also filed as: YASHIMA SHINJI
8 granted patents·2 pending applications·12 citations·filing 2003–2022
79Inventor score
Top patents by PatentIndex Score
10 records- 0172US12014943B2Method of manufacturing semiconductor device and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2022·Granted Jun 18, 2024·0 cites·21 claims
- 0270US8486222B2Substrate processing apparatus and method of manufacturing a semiconductor deviceAKAO TOKUNOBU·Filed 2011·Granted Jul 16, 2013·3 cites·9 claims
- 0370US8471477B2Substrate processing apparatus and method of manufacturing semiconductor deviceTOMITA MASAYUKI·Filed 2011·Granted Jun 25, 2013·3 cites·10 claims
- 0465US11519815B2Method of manufacturing semiconductor device and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2021·Granted Dec 6, 2022·0 cites·13 claims
- 0559US8987645B2Substrate processing apparatus having rotatable slot-type antenna and method of manufacturing semiconductor device using the sameOGAWA UNRYU·Filed 2011·Granted Mar 24, 2015·2 cites·4 claims
- 0658US8557720B2Substrate processing apparatus and method of manufacturing a semiconductor deviceAKAO TOKUNOBU·Filed 2011·Granted Oct 15, 2013·1 cites·12 claims
- 0755US9171724B2Substrate processing apparatus and method for manufacturing semiconductor deviceYASHIMA SHINJI·Filed 2012·Granted Oct 27, 2015·1 cites·6 claims
- 0843US7045447B2Semiconductor device producing method and semiconductor device producing apparatus including forming an oxide layer and changing the impedance or potential to form an oxynitrideHITACHI INT ELECTRIC INC·Filed 2003·Granted May 16, 2006·2 cites·21 claims
- 0943US2009255630A1Substrate processing apparatus and electrode memberHITACHI INT ELECTRIC INC·Filed 2006·Application pending·0 cites
- 1035US2003219989A1Semiconductor device producing method and semiconductor device producing apparatusFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →