Inventor · disambiguated record
Klaus Simon
Also filed as: SIMON KLAUS · SIMON KLAUS-P
86 granted patents·4 pending applications·4,407 citations·filing 1974–2019
99Inventor score
Top patents by PatentIndex Score
90 records- 0199US9740107B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Aug 22, 2017·10 cites·20 claims
- 0299US9366972B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jun 14, 2016·14 cites·20 claims
- 0399US8482845B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2010·Granted Jul 9, 2013·32 cites·16 claims
- 0499US7593092B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Sep 22, 2009·60 cites·15 claims
- 0599US7593093B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Sep 22, 2009·67 cites·9 claims
- 0699US7388648B2Lithographic projection apparatusASML NETHERLANDS BV·Filed 2005·Granted Jun 17, 2008·136 cites·20 claims
- 0799US7352434B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 1, 2008·178 cites·43 claims
- 0899US7213963B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 8, 2007·196 cites·28 claims
- 0999US7199858B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Apr 3, 2007·409 cites·29 claims
- 1099US7193232B2Lithographic apparatus and device manufacturing method with substrate measurement not through liquidASML NETHERLANDS BV·Filed 2003·Granted Mar 20, 2007·216 cites·33 claims
- 1199US7081943B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jul 25, 2006·199 cites·51 claims
- 1299US6952253B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Oct 4, 2005·1.8k cites·45 claims
- 1399US6867844B2Immersion photolithography system and method using microchannel nozzlesASML HOLDING NV·Filed 2003·Granted Mar 15, 2005·407 cites·40 claims
- 1498US7936444B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted May 3, 2011·35 cites·35 claims
- 1598US7482611B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jan 27, 2009·65 cites·38 claims
- 1698US7372541B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted May 13, 2008·74 cites·32 claims
- 1796US9798246B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Oct 24, 2017·5 cites·22 claims
- 1896US9482966B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2012·Granted Nov 1, 2016·12 cites·74 claims
- 1996US8154708B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2006·Granted Apr 10, 2012·23 cites·20 claims
- 2096US7795603B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Sep 14, 2010·15 cites·18 claims
- 2196US7738074B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jun 15, 2010·52 cites·20 claims
- 2296US7517211B2Imprint lithographyASML NETHERLANDS BV·Filed 2005·Granted Apr 14, 2009·27 cites·17 claims
- 2396US7038760B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 2, 2006·78 cites·21 claims
- 2495US8472002B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2010·Granted Jun 25, 2013·7 cites·28 claims
- 2595US7982850B2Immersion lithographic apparatus and device manufacturing method with gas supplyASML NETHERLANDS BV·Filed 2008·Granted Jul 19, 2011·14 cites·20 claims
- 2695US7359030B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Apr 15, 2008·92 cites·19 claims
- 2794US7411650B2Immersion photolithography system and method using microchannel nozzlesASML HOLDING NV·Filed 2005·Granted Aug 12, 2008·14 cites·20 claims
- 2893US9091940B2Lithographic apparatus and method involving a fluid inlet and a fluid outletASML NETHERLANDS BV·Filed 2012·Granted Jul 28, 2015·5 cites·71 claims
- 2993US8797503B2Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structureLOF JOERI·Filed 2011·Granted Aug 5, 2014·5 cites·20 claims
- 3092US10656538B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted May 19, 2020·2 cites·20 claims
- 3192US9477160B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Oct 25, 2016·3 cites·20 claims
- 3291US9383655B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Jul 5, 2016·3 cites·20 claims
- 3391US8730450B2Immersion photolithography system and method using microchannel nozzlesVOGEL HERMAN·Filed 2011·Granted May 20, 2014·4 cites·20 claims
- 3491US7878791B2Imprint lithographyASML NETHERLANDS BV·Filed 2006·Granted Feb 1, 2011·14 cites·26 claims
- 3590US7636475B2Imprint lithographyASML NETHERLANDS BV·Filed 2005·Granted Dec 22, 2009·8 cites·40 claims
- 3688US8670105B2Immersion photolithography system and method using microchannel nozzlesVOGEL HERMAN·Filed 2011·Granted Mar 11, 2014·3 cites·20 claims
- 3788US8558989B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2010·Granted Oct 15, 2013·3 cites·33 claims
- 3888US8011915B2Imprint lithographyASML NETHERLANDS BV·Filed 2006·Granted Sep 6, 2011·7 cites·9 claims
- 3987US10503084B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Dec 10, 2019·2 cites·20 claims
- 4086US10620545B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Apr 14, 2020·1 cites·20 claims
- 4186US8004649B2Immersion photolithography system and method using microchannel nozzlesASML HOLDING NV·Filed 2008·Granted Aug 23, 2011·4 cites·20 claims
- 4285US8823920B2Lithographic apparatus and device manufacturing methodSTREEFKERK BOB·Filed 2011·Granted Sep 2, 2014·2 cites·20 claims
- 4384US8913223B2Lithographic apparatus and device manufacturing methodSTREEFKERK BOB·Filed 2010·Granted Dec 16, 2014·2 cites·26 claims
- 4483US8100684B2Imprint lithographyKRUIJT-STEGEMAN YVONNE WENDELA·Filed 2009·Granted Jan 24, 2012·5 cites·22 claims
- 4582US9864271B2Imprint lithographyASML NETHERLANDS BV·Filed 2017·Granted Jan 9, 2018·1 cites·20 claims
- 4682US7676088B2Imprint lithographyASML NETHERLANDS BV·Filed 2004·Granted Mar 9, 2010·13 cites·40 claims
- 4780US9715178B2Immersion photolithography system and method using microchannel nozzlesASML HOLDING NV·Filed 2014·Granted Jul 25, 2017·1 cites·20 claims
- 4880US9610727B2Imprint lithographyASML NETHERLANDS BV·Filed 2014·Granted Apr 4, 2017·2 cites·19 claims
- 4974US10788755B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Sep 29, 2020·0 cites·19 claims
- 5074US7408624B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Aug 5, 2008·5 cites·21 claims
Showing the top 50 of 90 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →