Inventor · disambiguated record
Rajkumar Jakkaraju
Also filed as: JAKKARAJU RAJKUMAR
10 granted patents·4 pending applications·84 citations·filing 2003–2024
88Inventor score
Files withAPPLIED MATERIALS INC7ASM IP HOLDING BV2TRIKON TECHNOLOGIES LTD2AVIZA TECHNOLOGIES LTD1FORD MARK ASHLEY1
Top patents by PatentIndex Score
14 records- 0194US9583349B2Lowering tungsten resistivity by replacing titanium nitride with titanium silicon nitrideAPPLIED MATERIALS INC·Filed 2014·Granted Feb 28, 2017·17 cites·11 claims
- 0287US8778797B2Systems and methods for selective tungsten deposition in viasGAO JUWEN·Filed 2011·Granted Jul 15, 2014·11 cites·18 claims
- 0386US8585873B2Methods and apparatus for sputteringFORD MARK ASHLEY·Filed 2005·Granted Nov 19, 2013·23 cites·11 claims
- 0476US9514933B2Film deposition using spatial atomic layer deposition or pulsed chemical vapor depositionAPPLIED MATERIALS INC·Filed 2014·Granted Dec 6, 2016·3 cites·18 claims
- 0574US9881787B2Deposition methods for uniform and conformal hybrid titanium oxide filmsAPPLIED MATERIALS INC·Filed 2016·Granted Jan 30, 2018·2 cites·12 claims
- 0673US7327073B2Acoustic resonatorsAVIZA TECHNOLOGIES LTD·Filed 2005·Granted Feb 5, 2008·8 cites·2 claims
- 0772US6944922B2Method of forming an acoustic resonatorTRIKON TECHNOLOGIES LTD·Filed 2003·Granted Sep 20, 2005·13 cites·17 claims
- 0861US7141913B2Acoustic resonatorsTRIKON TECHNOLOGIES LTD·Filed 2004·Granted Nov 28, 2006·7 cites·10 claims
- 0961US2024371662A1Method, system and apparatus for surface modificationASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1054US2024420958A1Method, system, and apparatus for deposition of transition metal filmASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1151US9162930B2PVD ALN film with oxygen doping for a low etch rate hardmask filmAPPLIED MATERIALS INC·Filed 2013·Granted Oct 20, 2015·0 cites·12 claims
- 1251US2014001576A1Lowering tungsten resistivity by replacing titanium nitride with titanium silicon nitrideAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 1347US9461137B1Tungsten silicide nitride films and methods of formationAPPLIED MATERIALS INC·Filed 2015·Granted Oct 4, 2016·0 cites·20 claims
- 1442US2015114827A1Methods of forming a metal dielectric etching stop layer on a substrate with high etching selectivityAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →