Inventor · disambiguated record
Mark Williams
Also filed as: WILLIAMS MARK · WILLIAMS MARK EDD
6 granted patents·1 pending application·10 citations·filing 2003–2014
74Inventor score
Top patents by PatentIndex Score
7 records- 0175US8779635B2Arrangement of reticle positioning device for actinic inspection of EUV reticlesKLA TENCOR CORP·Filed 2013·Granted Jul 15, 2014·2 cites·15 claims
- 0273US8976336B2Shear-layer chuck for lithographic apparatusASML HOLDING NV·Filed 2014·Granted Mar 10, 2015·2 cites·12 claims
- 0365US8786832B2Shear-layer chuck for lithographic apparatusASML HOLDING NV·Filed 2013·Granted Jul 22, 2014·1 cites·13 claims
- 0459US7075623B2Flexure-supported split reaction massASML HOLDING NV·Filed 2003·Granted Jul 11, 2006·5 cites·20 claims
- 0554US2011013164A1Shear-Layer Chuck for Lithographic ApparatusASML HOLDING NV·Filed 2009·Application pending·0 cites
- 0643US8724115B2Linear stage and metrology architecture for reflective electron beam lithographyKLA TENCOR CORP·Filed 2013·Granted May 13, 2014·0 cites·30 claims
- 0740US9690213B2Linear Stage for reflective electron beam lithographyUMMETHALA UPENDRA·Filed 2012·Granted Jun 27, 2017·0 cites·63 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →