Inventor · disambiguated record
Jason M. Blackburn
Also filed as: BLACKBURN JASON · BLACKBURN JASON M
9 granted patents·206 citations·filing 2000–2007
89Inventor score
Top patents by PatentIndex Score
9 records- 0194US7211509B1Method for enhancing the nucleation and morphology of ruthenium films on dielectric substrates using amine containing compoundsNOVELLUS SYSTEMS INC·Filed 2004·Granted May 1, 2007·82 cites·24 claims
- 0291US6689700B1Chemical fluid deposition method for the formation of metal and metal alloy films on patterned and unpatterned substratesUNIV MASSACHUSETTS·Filed 2000·Granted Feb 10, 2004·66 cites·25 claims
- 0381US7041596B1Surface treatment using iodine plasma to improve metal depositionNOVELLUS SYSTEMS INC·Filed 2004·Granted May 9, 2006·25 cites·41 claims
- 0469US6992018B2Chemical fluid deposition for the formation of metal and metal alloy films on patterned and unpatterned substratesUNIV MASSACHUSETTS·Filed 2003·Granted Jan 31, 2006·12 cites·44 claims
- 0567US7456101B1Method for enhancing the nucleation and morphology of ruthenium films on dielectric substrates using amine containing compoundsNOVELLUS SYSTEMS INC·Filed 2007·Granted Nov 25, 2008·2 cites·13 claims
- 0664US7217398B2Deposition reactor with precursor recycleNOVELLUS SYSTEMS·Filed 2002·Granted May 15, 2007·7 cites·26 claims
- 0758US6884737B1Method and apparatus for precursor delivery utilizing the melting point depression of solid deposition precursors in the presence of supercritical fluidsNOVELLUS SYSTEMS INC·Filed 2002·Granted Apr 26, 2005·6 cites·11 claims
- 0849US7279417B1Use of metallocenes to inhibit copper oxidation during semiconductor processingNOVELLUS SYSTEMS INC·Filed 2004·Granted Oct 9, 2007·2 cites·23 claims
- 0948US6984584B2Contamination suppression in chemical fluid depositionUNIV MASSACHUSETTS·Filed 2002·Granted Jan 10, 2006·4 cites·34 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →