Inventor · disambiguated record
Shogo Inaba
Also filed as: INABA SHOGO
38 granted patents·12 pending applications·168 citations·filing 2000–2025
97Inventor score
Top patents by PatentIndex Score
50 records- 0194US8026120B2Method of manufacturing MEMS deviceSEIKO EPSON CORP·Filed 2010·Granted Sep 27, 2011·19 cites·7 claims
- 0292US7880245B2Electronic device and method for manufacturing thereofSEIKO EPSON CORP·Filed 2010·Granted Feb 1, 2011·11 cites·14 claims
- 0391US7994594B2Electronic device, resonator, oscillator and method for manufacturing electronic deviceSEIKO EPSON CORP·Filed 2008·Granted Aug 9, 2011·16 cites·16 claims
- 0491US7709912B2Electronic device and method for manufacturing thereofSEIKO EPSON CORP·Filed 2007·Granted May 4, 2010·17 cites·5 claims
- 0588US7884431B2MEMS device having a movable electrodeSEIKO EPSON CORP·Filed 2010·Granted Feb 8, 2011·5 cites·5 claims
- 0688US7671430B2MEMS resonator and manufacturing method of the sameSEIKO EPSON CORP·Filed 2007·Granted Mar 2, 2010·13 cites·2 claims
- 0787US7696587B2MEMS device having a movable electrodeSEIKO EPSON CORP·Filed 2007·Granted Apr 13, 2010·11 cites·3 claims
- 0886US8410561B2Electronic device and method for manufacturing thereofSATO AKIRA·Filed 2010·Granted Apr 2, 2013·6 cites·17 claims
- 0986US7989905B2MEMS device having a movable electrodeSEIKO EPSON CORP·Filed 2010·Granted Aug 2, 2011·4 cites·8 claims
- 1086US7956709B2MEMS switch and manufacturing method thereofSEIKO EPSON CORP·Filed 2007·Granted Jun 7, 2011·13 cites·20 claims
- 1185US7838952B2MEMS device and fabrication method thereofSEIKO EPSON CORP·Filed 2007·Granted Nov 23, 2010·10 cites·14 claims
- 1284US7656252B2Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereofSEIKO EPSON CORP·Filed 2006·Granted Feb 2, 2010·9 cites·9 claims
- 1378US11065639B2Coating treatment method, computer storage medium and coating treatment apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Jul 20, 2021·2 cites·9 claims
- 1476US8129804B2Electronic device, resonator, oscillator and method for manufacturing electronic deviceINABA SHOGO·Filed 2011·Granted Mar 6, 2012·3 cites·12 claims
- 1574US8305152B2MEMS oscillator and method of manufacturing thereofWATANABE TORU·Filed 2010·Granted Nov 6, 2012·4 cites·12 claims
- 1672US12435427B2Substrate processing method and storage mediumTOKYO ELECTRON LTD·Filed 2023·Granted Oct 7, 2025·0 cites·7 claims
- 1772US9154109B2Vibrator, oscillator, electronic apparatus, moving object, and method of manufacturing vibratorSEIKO EPSON CORP·Filed 2013·Granted Oct 6, 2015·3 cites·7 claims
- 1872US8525277B2MEMS deviceINABA SHOGO·Filed 2011·Granted Sep 3, 2013·3 cites·11 claims
- 1970US8395227B2MEMS device having a movable electrodeWATANABE TORU·Filed 2012·Granted Mar 12, 2013·1 cites·5 claims
- 2069US10359702B2Development processing apparatus, development processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2018·Granted Jul 23, 2019·1 cites·10 claims
- 2168US8796845B2Electronic device covered by multiple layers and method for manufacturing electronic deviceKANEMOTO YOKO·Filed 2011·Granted Aug 5, 2014·2 cites·6 claims
- 2264US8198957B2Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereofINABA SHOGO·Filed 2011·Granted Jun 12, 2012·1 cites·13 claims
- 2364US6479342B1Semiconductor devices and manufacturing methods thereofSEIKO EPSON CORP·Filed 2000·Granted Nov 12, 2002·10 cites·31 claims
- 2462US11773492B2Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2021·Granted Oct 3, 2023·0 cites·5 claims
- 2561US8552512B2MEMS device and fabrication method thereofINABA SHOGO·Filed 2010·Granted Oct 8, 2013·1 cites·12 claims
- 2659US8432232B2MEMS device and oscillatorINABA SHOGO·Filed 2011·Granted Apr 30, 2013·1 cites·16 claims
- 2755US8063721B2Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereofINABA SHOGO·Filed 2009·Granted Nov 22, 2011·1 cites·6 claims
- 2855US8018302B2Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereofSEIKO EPSON CORP·Filed 2009·Granted Sep 13, 2011·1 cites·9 claims
- 2955US2025316503A1Filter apparatus for substrate treatment apparatus and clean air supply methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 3054US8115266B2MEMS device having a movable electrodeWATANABE TORU·Filed 2011·Granted Feb 14, 2012·0 cites·4 claims
- 3153US9176013B2Sensor, electronic apparatus, robot, and mobile objectSEIKO EPSON CORP·Filed 2013·Granted Nov 3, 2015·0 cites·17 claims
- 3252US2024050977A1Coating treatment apparatus, coating treatment method, and computer storage mediumTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 3351US11679976B2Structure forming method and deviceSEIKO EPSON CORP·Filed 2020·Granted Jun 20, 2023·0 cites·7 claims
- 3451US10761109B2Physical quantity sensor, inertia measurement device, vehicle positioning device, portable electronic apparatus, electronic apparatus, and vehicleSEIKO EPSON CORP·Filed 2018·Granted Sep 1, 2020·0 cites·20 claims
- 3550US8592925B2Functional device with functional structure of a microelectromechanical system disposed in a cavity of a substrate, and manufacturing method thereofINABA SHOGO·Filed 2009·Granted Nov 26, 2013·0 cites·12 claims
- 3650US2012127683A1Electronic device, resonator, oscillator and method for manufacturing electronic deviceINABA SHOGO·Filed 2012·Application pending·0 cites
- 3748US11557495B2Coating film forming methodTOKYO ELECTRON LTD·Filed 2020·Granted Jan 17, 2023·0 cites·7 claims
- 3848US7892875B2MEMS resonator and manufacturing method of the sameSEIKO EPSON CORP·Filed 2010·Granted Feb 22, 2011·0 cites·4 claims
- 3948US2012012950A1Functional device and manufacturing method thereofINABA SHOGO·Filed 2011·Application pending·0 cites
- 4045US8760234B2MEMS vibrator and oscillatorINABA SHOGO·Filed 2012·Granted Jun 24, 2014·0 cites·6 claims
- 4144US2014312734A1Vibrator, oscillator, electronic device, moving object, and method of manufacturing vibratorSEIKO EPSON CORP·Filed 2014·Application pending·0 cites
- 4244US2014103778A1Vibrator, manufacturing method of vibrator, electronic apparatus, and mobile unitSEIKO EPSON CORP·Filed 2013·Application pending·0 cites
- 4343US8362577B2Resonator including a microelectromechanical system structure with first and second structures of silicon layersSEIKO EPSON CORP·Filed 2011·Granted Jan 29, 2013·0 cites·10 claims
- 4443US2014145551A1Vibrator, manufacturing method of vibrator, electronic apparatus, and moving objectSEIKO EPSON CORP·Filed 2013·Application pending·0 cites
- 4543US2011306153A1Method of manufacturing mems deviceKIHARA RYUJI·Filed 2011·Application pending·0 cites
- 4642US2006180882A1MEMS device and manufacturing method of MEMS deviceSEIKO EPSON CORP·Filed 2006·Application pending·0 cites
- 4740US6897481B2Semiconductor devices and manufacturing methods thereofSEIKO EPSON CORP·Filed 2002·Granted May 24, 2005·0 cites·15 claims
- 4838US2015340968A1Mems structure, electronic apparatus, and moving objectSEIKO EPSON CORP·Filed 2015·Application pending·0 cites
- 4934US2015315011A1Mems structure, electronic apparatus, and moving objectSEIKO EPSON CORP·Filed 2015·Application pending·0 cites
- 5030US2012256692A1OscillatorYAJIMA ARITSUGU·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →