Inventor · disambiguated record
Takehide Hayashi
Also filed as: HAYASHI TAKEHIDE
9 granted patents·2 pending applications·69 citations·filing 1993–2020
84Inventor score
Top patents by PatentIndex Score
11 records- 0197US8497476B2Inspection deviceHATAKEYAMA MASAHIRO·Filed 2012·Granted Jul 30, 2013·42 cites·10 claims
- 0287US8624182B2Electro-optical inspection apparatus and method with dust or particle collection functionWATANABE KENJI·Filed 2011·Granted Jan 7, 2014·7 cites·12 claims
- 0386US10157722B2Inspection deviceEBARA CORP·Filed 2016·Granted Dec 18, 2018·3 cites·15 claims
- 0460US2014014848A1Inspection deviceEBARA CORP·Filed 2013·Application pending·0 cites
- 0556US9105444B2Electro-optical inspection apparatus and method with dust or particle collection functionEBARA CORP·Filed 2013·Granted Aug 11, 2015·0 cites·8 claims
- 0654US11217421B2Adjustment method and electron beam deviceEBARA CORP·Filed 2020·Granted Jan 4, 2022·0 cites·5 claims
- 0752US11251017B2Method for evaluating secondary optical system of electron beam inspection deviceEBARA CORP·Filed 2020·Granted Feb 15, 2022·0 cites·19 claims
- 0852US9728374B2Inspection apparatusEBARA CORP·Filed 2016·Granted Aug 8, 2017·0 cites·5 claims
- 0950US9368322B2Inspection apparatusEBARA CORP·Filed 2015·Granted Jun 14, 2016·0 cites·4 claims
- 1046US5351836AContainer for plate-like objectsDAIFUKU KK·Filed 1993·Granted Oct 4, 1994·17 cites·20 claims
- 1133US2004234360A1System for conveying and transferring semiconductor or liquid crystal wafer one by oneFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →