Inspection device

Abstract

An inspection device for inspecting a surface of an inspection object using a beam includes a beam generator capable of generating one of either charge particles or an electromagnetic wave as a beam, a primary optical system capable of guiding and irradiating the beam to the inspection object supported within a working chamber, a secondary optical system capable of including a first movable numerical aperture and a first detector which detects secondary charge particles generated from the inspection object, the secondary charge particles passing through the first movable numerical aperture, an image processing system capable of forming an image based on the secondary charge particles detected by the first detector; and a second detector arranged between the first movable numerical aperture and the first detector and which detects a location and shape at a cross over location of the secondary charge particles generated from the inspection object.

What is claimed is: 
     
         1 . An inspection device comprising:
 a laser generator generating a laser being irradiated to an inspection object supported within a working chamber;   a secondary optical system having a detector detecting secondary charge particles generated from the inspection object irradiated with the laser; and   an image processing system forming an image based on the secondary charge particles detected by the detector.   
     
     
         2 . The inspection device according to  claim 1 , the detector detecting the secondary charge particles generated from a surface opposite a surface of the inspection object irradiated with the laser. 
     
     
         3 . The inspection device according to  claim 1 , the detector detecting the secondary charge particles generated from a surface of the inspection object irradiated with the laser. 
     
     
         4 . The inspection device according to  claim 3  further comprising:
 a primary optical system guiding the laser generated by the laser generator to the inspection object. 
 
     
     
         5 . The inspection device according to  claim 3  further comprising:
 a hollow fiber or a hollow pipe guiding the laser generated by the laser generator to the inspection object. 
 
     
     
         6 . The inspection device according to  claim 1 , the laser including wavelengths of either UV, DUV, EUV or X-ray. 
     
     
         7 . The inspection device according to  claim 1 , the laser generator having a first light source generating a first wavelength laser and a second light source generating a second wavelength laser. 
     
     
         8 . The inspection device according to  claim 7 , the first wavelength laser and the second wavelength laser being irradiated to the inspection object alternately. 
     
     
         9 . The inspection device according to  claim 1 , the secondary optical system further having:
 a first lens accelerating the secondary charge particles generated from the inspection object;   a second lens group changing a magnification factor by converging the secondary accelerated charge particles and forming a cross over the numerical aperture; and   a third lens forming an image of the secondary charge particles passing through the second lenses on the detector.