Inventor · disambiguated record
Swayambhu Prasad Behera
Also filed as: BEHERA SWAYAMBHU P · BEHERA SWAYAMBHU PRASAD
7 granted patents·1 pending application·65 citations·filing 2014–2022
83Inventor score
Technology areasH10P
Files withAPPLIED MATERIALS INC8
Top patents by PatentIndex Score
8 records- 0196US9721784B2Ultra-conformal carbon film depositionAPPLIED MATERIALS INC·Filed 2014·Granted Aug 1, 2017·29 cites·16 claims
- 0294US10403535B2Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition systemAPPLIED MATERIALS INC·Filed 2015·Granted Sep 3, 2019·11 cites·17 claims
- 0391USD1034491SEdge ringAPPLIED MATERIALS INC·Filed 2020·Granted Jul 9, 2024·17 cites·1 claims
- 0490US11380575B2Film thickness uniformity improvement using edge ring and bias electrode geometryAPPLIED MATERIALS INC·Filed 2020·Granted Jul 5, 2022·2 cites·20 claims
- 0589US10074534B2Ultra-conformal carbon film depositionAPPLIED MATERIALS INC·Filed 2017·Granted Sep 11, 2018·5 cites·9 claims
- 0671US12266560B2Film thickness uniformity improvement using edge ring and bias electrode geometryAPPLIED MATERIALS INC·Filed 2022·Granted Apr 1, 2025·0 cites·20 claims
- 0767US10325800B2High temperature electrostatic chucking with dielectric constant engineered in-situ charge trap materialsAPPLIED MATERIALS INC·Filed 2014·Granted Jun 18, 2019·1 cites·12 claims
- 0856US2019355609A1High temperature electrostatic chucking with dielectric constant engineered in-situ charge trap materialsAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →