Inventor · disambiguated record
David G. Halley
Also filed as: HALLEY DAVID · HALLEY DAVID G · HALLEY DAVID GEORGE
34 granted patents·2 pending applications·850 citations·filing 1977–2006
98Inventor score
Top patents by PatentIndex Score
36 records- 0198US6520843B1High planarity chemical mechanical planarizationSTRASBAUGH·Filed 2000·Granted Feb 18, 2003·111 cites·28 claims
- 0297US6551179B1Hard polishing pad for chemical mechanical planarizationSTRASBAUGH·Filed 2000·Granted Apr 22, 2003·80 cites·20 claims
- 0390US6629874B1Feature height measurement during CMPSTRASBAUGH·Filed 2000·Granted Oct 7, 2003·37 cites·19 claims
- 0490US6602121B1Pad support apparatus for chemical mechanical planarizationSTRASBAUGH·Filed 2000·Granted Aug 5, 2003·31 cites·13 claims
- 0589US6346036B1Multi-pad apparatus for chemical mechanical planarizationSTRASBAUGH·Filed 2000·Granted Feb 12, 2002·34 cites·20 claims
- 0684US7083497B2Polishing pad with built-in optical sensorSTRASBAUGH INC·Filed 2006·Granted Aug 1, 2006·9 cites·17 claims
- 0784US6547651B1Subaperture chemical mechanical planarization with polishing pad conditioningSTRASBAUGH·Filed 2000·Granted Apr 15, 2003·26 cites·23 claims
- 0882US6739945B2Polishing pad with built-in optical sensorSTRASBAUGH·Filed 2001·Granted May 25, 2004·19 cites·23 claims
- 0981US6692339B1Combined chemical mechanical planarization and cleaningSTRASBAUGH·Filed 2000·Granted Feb 17, 2004·21 cites·20 claims
- 1080US6517419B1Shaping polishing pad for small head chemical mechanical planarizationSTRASBAUGH·Filed 2000·Granted Feb 11, 2003·21 cites·10 claims
- 1180US6514129B1Multi-action chemical mechanical planarization device and methodSTRASBAUGH·Filed 2000·Granted Feb 4, 2003·21 cites·9 claims
- 1279US6511368B1Spherical drive assembly for chemical mechanical planarizationSTRASBAUGH·Filed 2000·Granted Jan 28, 2003·22 cites·19 claims
- 1379US6464574B1Pad quick release device for chemical mechanical planarizationSTRASBAUGH·Filed 2000·Granted Oct 15, 2002·20 cites·17 claims
- 1478US6976901B1In situ feature height measurementSTRASBAUGH·Filed 2003·Granted Dec 20, 2005·21 cites·20 claims
- 1577US6855030B2Modular method for chemical mechanical planarizationSTRASBAUGH·Filed 2002·Granted Feb 15, 2005·20 cites·21 claims
- 1677US6527621B1Pad retrieval apparatus for chemical mechanical planarizationSTRASBAUGH·Filed 2000·Granted Mar 4, 2003·18 cites·20 claims
- 1776US6361647B1Method and apparatus for chemical mechanical polishingSTRAS BAUGH·Filed 1999·Granted Mar 26, 2002·48 cites·19 claims
- 1874US6379235B1Wafer support for chemical mechanical planarizationSTRAUSBAUGH·Filed 2000·Granted Apr 30, 2002·20 cites·30 claims
- 1972US6921719B2Method of preparing whole semiconductor wafer for analysisSTRASBAUGH A CALIFORNIA CORP·Filed 2002·Granted Jul 26, 2005·19 cites·24 claims
- 2071US6885206B2Device for supporting thin semiconductor wafersSTRASBAUGH·Filed 2003·Granted Apr 26, 2005·15 cites·4 claims
- 2171US6227956B1Pad quick release device for chemical mechanical polishingSTRASBAUGH·Filed 1999·Granted May 8, 2001·30 cites·21 claims
- 2269US6808443B2Projected gimbal point driveLAM RES CORP·Filed 2001·Granted Oct 26, 2004·12 cites·22 claims
- 2369US6514121B1Polishing chemical delivery for small head chemical mechanical planarizationSTRASBAUGH·Filed 2000·Granted Feb 4, 2003·12 cites·17 claims
- 2469US4900377AMethod of making a limited life padWEYERHAEUSER CO·Filed 1988·Granted Feb 13, 1990·83 cites·42 claims
- 2568US6887133B1Pad support method for chemical mechanical planarizationSTRASBAUGH·Filed 2003·Granted May 3, 2005·9 cites·9 claims
- 2667US4848607AClassifierWEYERHAEUSER CO·Filed 1987·Granted Jul 18, 1989·22 cites·12 claims
- 2764US4141390AOptical electronic seed sowing systemWEYERHAEUSER CO·Filed 1977·Granted Feb 27, 1979·21 cites·76 claims
- 2859US6945856B2Subaperture chemical mechanical planarization with polishing pad conditioningSTRASBAUGH·Filed 2003·Granted Sep 20, 2005·6 cites·15 claims
- 2956US6450860B1Pad transfer apparatus for chemical mechanical planarizationSTRASBAUGH·Filed 2000·Granted Sep 17, 2002·6 cites·20 claims
- 3053US6986701B2Polishing pad with built-in optical sensorSTRASBAUGH·Filed 2004·Granted Jan 17, 2006·4 cites·4 claims
- 3151US5288266AStorage vesselGORE W L & ASS UK·Filed 1992·Granted Feb 22, 1994·15 cites·14 claims
- 3247US2007032170A1Polishing pad with built-in optical sensorSTRASBAUGH·Filed 2006·Application pending·0 cites
- 3345US6495463B2Method for chemical mechanical polishingSTRASBAUGH·Filed 1999·Granted Dec 17, 2002·9 cites·17 claims
- 3436US5389036AStorage vesselGORE & ASS·Filed 1994·Granted Feb 14, 1995·6 cites·12 claims
- 3530US4969351AApparatus for determining drainage time of papermaking stockWEYERHAEUSER CO·Filed 1989·Granted Nov 13, 1990·2 cites·14 claims
- 3616US2002197924A1Water-vapour-permeable composite materialFiled 1997·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →