Inventor · disambiguated record
Paul B. Comita
Also filed as: COMITA PAUL · COMITA PAUL B · COMITA PAUL BRIAN
38 granted patents·10 pending applications·1,462 citations·filing 1988–2023
98Inventor score
Top patents by PatentIndex Score
48 records- 0197US6494959B1Process and apparatus for cleaning a silicon surfaceAPPLIED MATERIALS INC·Filed 2000·Granted Dec 17, 2002·260 cites·41 claims
- 0295US7645339B2Silicon-containing layer deposition with silicon compoundsAPPLIED MATERIALS INC·Filed 2006·Granted Jan 12, 2010·14 cites·31 claims
- 0394US6833322B2Apparatuses and methods for depositing an oxide filmAPPLIED MATERIALS INC·Filed 2002·Granted Dec 21, 2004·72 cites·54 claims
- 0494US6562720B2Apparatus and method for surface finishing a silicon filmAPPLIED MATERIALS INC·Filed 2002·Granted May 13, 2003·99 cites·20 claims
- 0592US7141378B2Exploring fluorophore microenvironmentsBLUESHIFT BIOTECHNOLOGIES INC·Filed 2005·Granted Nov 28, 2006·18 cites·19 claims
- 0692US6476362B1Lamp array for thermal processing chamberAPPLIED MATERIALS INC·Filed 2000·Granted Nov 5, 2002·63 cites·35 claims
- 0792US6042654AMethod of cleaning CVD cold-wall chamber and exhaust linesAPPLIED MATERIALS INC·Filed 1998·Granted Mar 28, 2000·134 cites·39 claims
- 0891US7758697B2Silicon-containing layer deposition with silicon compoundsAPPLIED MATERIALS INC·Filed 2008·Granted Jul 20, 2010·10 cites·23 claims
- 0991US6489241B1Apparatus and method for surface finishing a silicon filmAPPLIED MATERIALS INC·Filed 1999·Granted Dec 3, 2002·110 cites·22 claims
- 1090US6455814B1Backside heating chamber for emissivity independent thermal processesAPPLIED MATERIALS INC·Filed 2001·Granted Sep 24, 2002·51 cites·17 claims
- 1189US7540920B2Silicon-containing layer deposition with silicon compoundsAPPLIED MATERIALS INC·Filed 2003·Granted Jun 2, 2009·31 cites·72 claims
- 1287US6399510B1Bi-directional processing chamber and method for bi-directional processing of semiconductor substratesAPPLIED MATERIALS INC·Filed 2000·Granted Jun 4, 2002·48 cites·28 claims
- 1385US6254686B1Vented lower liner for heating exhaust gas from a single substrate reactorAPPLIED MATERIALS INC·Filed 2000·Granted Jul 3, 2001·28 cites·9 claims
- 1485US5510164ASingle-sided ablative worm optical disk with multilayer protective coatingIBM·Filed 1994·Granted Apr 23, 1996·40 cites·10 claims
- 1583US6153260AMethod for heating exhaust gas in a substrate reactorAPPLIED MATERIALS INC·Filed 1997·Granted Nov 28, 2000·45 cites·6 claims
- 1682US7576862B2Measuring time dependent fluorescenceBLUESHIFT BIOTECHNOLOGIES INC·Filed 2004·Granted Aug 18, 2009·21 cites·63 claims
- 1782US4880959AProcess for interconnecting thin-film electrical circuitsIBM·Filed 1988·Granted Nov 14, 1989·38 cites·7 claims
- 1880US6277194B1Method for in-situ cleaning of surfaces in a substrate processing chamberAPPLIED MATERIALS INC·Filed 1999·Granted Aug 21, 2001·66 cites·38 claims
- 1979US12356848B2Solar antenna array fabricationNOVASOLIX INC·Filed 2023·Granted Jul 8, 2025·0 cites·5 claims
- 2077US6366861B1Method of determining a wafer characteristic using a film thickness monitorAPPLIED MATERIALS INC·Filed 1997·Granted Apr 2, 2002·49 cites·16 claims
- 2177US5914050APurged lower linerAPPLIED MATERIALS INC·Filed 1997·Granted Jun 22, 1999·46 cites·24 claims
- 2275US5525392AMagnetic recording medium having a fluorinated polymeric protective layer formed by an ion beamIBM·Filed 1995·Granted Jun 11, 1996·27 cites·22 claims
- 2374US7674588B2Screening using polarization anisotropy in FRET emissionsBLUESHIFT BIOTECHNOLOGIES INC·Filed 2008·Granted Mar 9, 2010·3 cites·36 claims
- 2470US11824264B2Solar antenna array fabricationNOVASOLIX INC·Filed 2022·Granted Nov 21, 2023·0 cites·34 claims
- 2570US7812956B2Time dependent fluorescence measurementsBLUESHIFT BIOTECHNOLOGIES INC·Filed 2008·Granted Oct 12, 2010·5 cites·62 claims
- 2670US6159641AMethod for the repair of defects in lithographic masksIBM·Filed 1993·Granted Dec 12, 2000·21 cites·9 claims
- 2768US5686206AMethod for the repair of lithographic masksIBM·Filed 1994·Granted Nov 11, 1997·21 cites·5 claims
- 2866US6774040B2Apparatus and method for surface finishing a silicon filmAPPLIED MATERIALS INC·Filed 2002·Granted Aug 10, 2004·16 cites·38 claims
- 2964US6876442B2Method of calibrating and using a semiconductor processing systemAPPLIED MATERIALS INC·Filed 2002·Granted Apr 5, 2005·10 cites·22 claims
- 3063US5924058APermanently mounted reference sample for a substrate measurement toolAPPLIED MATERIALS INC·Filed 1997·Granted Jul 13, 1999·27 cites·24 claims
- 3161US5246745ALaser-induced chemical vapor deposition of thin-film conductorsIBM·Filed 1991·Granted Sep 21, 1993·32 cites·7 claims
- 3258US6685779B2Method and a system for sealing an epitaxial silicon layer on a substrateAPPLIED MATERIALS INC·Filed 2002·Granted Feb 3, 2004·5 cites·15 claims
- 3357US6368567B2Point-of-use exhaust by-product reactorAPPLIED MATERIALS INC·Filed 1998·Granted Apr 9, 2002·19 cites·18 claims
- 3457US5407710ALaser interconnection of circuits on transparent substrateIBM·Filed 1993·Granted Apr 18, 1995·20 cites·3 claims
- 3552US2006234279A1Screening using polarization anisotropy in FRET emissionsBLUESHIFT BIOTECHNOLOGIES INC·Filed 2006·Application pending·0 cites
- 3651US10580920B2Solar antenna array fabricationNOVASOLIX INC·Filed 2017·Granted Mar 3, 2020·0 cites·9 claims
- 3750US6376387B2Method of sealing an epitaxial silicon layer on a substrateAPPLIED MATERIALS INC·Filed 1999·Granted Apr 23, 2002·13 cites·16 claims
- 3847US7643146B2Methods and apparatus for reducing noise in scatterometry measurementsBLUESHIFT BIOTECHNOLOGIES INC·Filed 2006·Granted Jan 5, 2010·0 cites·16 claims
- 3944US10622503B2Solar antenna array fabricationNOVASOLIX INC·Filed 2017·Granted Apr 14, 2020·0 cites·8 claims
- 4044US2005264805A1Methods and apparatus for scanning small sample volumesBLUESHIFT BIOTECHNOLOGIES INC·Filed 2005·Application pending·0 cites
- 4142US2004060900A1Apparatuses and methods for treating a silicon filmFiled 2003·Application pending·0 cites
- 4241US2004060899A1Apparatuses and methods for treating a silicon filmAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
- 4339US2002166256A1Process and apparatus for cleaning a silicon surfaceFiled 2002·Application pending·0 cites
- 4438US2004050325A1Apparatus and method for delivering process gas to a substrate processing systemFiled 2002·Application pending·0 cites
- 4538US2004175893A1Apparatuses and methods for forming a substantially facet-free epitaxial filmAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
- 4637US2017309767A1Incremental solar antenna array fabricationNOVASOLIX INC·Filed 2016·Application pending·0 cites
- 4735US2004072446A1Method for fabricating an ultra shallow junction of a field effect transistorAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
- 4826US2004050326A1Apparatus and method for automatically controlling gas flow in a substrate processing systemFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →