Inventor · disambiguated record
Farhat A. Quli
Also filed as: QULI FARHAT · QULI FARHAT A
10 granted patents·4 pending applications·26 citations·filing 2010–2024
84Inventor score
Top patents by PatentIndex Score
14 records- 0186US9222842B2High temperature sensor wafer for in-situ measurements in active plasmaSUN MEI·Filed 2013·Granted Dec 29, 2015·9 cites·57 claims
- 0279US10720350B2Etch-resistant coating on sensor wafers for in-situ measurementNGUYEN ANDREW·Filed 2010·Granted Jul 21, 2020·6 cites·16 claims
- 0377US9719867B2Method and system for measuring heat fluxKLA TENCOR CORP·Filed 2014·Granted Aug 1, 2017·5 cites·25 claims
- 0470US9360302B2Film thickness monitorJENSEN EARL·Filed 2012·Granted Jun 7, 2016·3 cites·18 claims
- 0566US9134186B2Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpiecesSUN MEI·Filed 2011·Granted Sep 15, 2015·2 cites·52 claims
- 0665US10796969B2System and method for fabricating semiconductor wafer features having controlled dimensionsKLA TENCOR CORP·Filed 2018·Granted Oct 6, 2020·1 cites·11 claims
- 0762US11784071B2Process temperature measurement device fabrication techniques and methods of calibration and data interpolation of the sameKLA CORP·Filed 2022·Granted Oct 10, 2023·0 cites·18 claims
- 0859US11385187B1Method of fabricating particle size standards on substratesKLA CORP·Filed 2021·Granted Jul 12, 2022·0 cites·20 claims
- 0956US2025054789A1Method of fabrication and implementation of process condition measurement deviceKLA CORP·Filed 2024·Application pending·0 cites
- 1053US11315811B2Process temperature measurement device fabrication techniques and methods of calibration and data interpolation of the sameKLA CORP·Filed 2019·Granted Apr 26, 2022·0 cites·26 claims
- 1152US2025239473A1Process condition measurement device including thermally isolated electronic modulesKLA CORP·Filed 2024·Application pending·0 cites
- 1245US11688614B2Mitigating thermal expansion mismatch in temperature probe construction apparatus and methodKLA CORP·Filed 2021·Granted Jun 27, 2023·0 cites·20 claims
- 1342US2022223441A1Process condition sensing apparatusKLA CORP·Filed 2021·Application pending·0 cites
- 1432US2020135519A1Shape-Distortion Standards for Calibrating Measurement Tools for Nominally Flat ObjectsKLA CORP·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →