Inventor · disambiguated record
Douglas J. Guerrero
Also filed as: GUERRERO DOUGLAS · GUERRERO DOUGLAS J
22 granted patents·6 pending applications·710 citations·filing 1997–2024
96Inventor score
Files withBREWER SCIENCE INC16GUERRERO DOUGLAS J5INFINEON TECHNOLOGIES RICHMOND1LIN QIN1MEADOR JIM D1
Top patents by PatentIndex Score
28 records- 0196US5919599AThermosetting anti-reflective coatings at deep ultravioletBREWER SCIENCE INC·Filed 1997·Granted Jul 6, 1999·157 cites·19 claims
- 0295US8968989B2Assist layers for EUV lithographyBREWER SCIENCE INC·Filed 2012·Granted Mar 3, 2015·297 cites·15 claims
- 0394US8257910B1Underlayers for EUV lithographyGUERRERO DOUGLAS J·Filed 2009·Granted Sep 4, 2012·38 cites·35 claims
- 0489US9640396B2Spin-on spacer materials for double- and triple-patterning lithographyLIN QIN·Filed 2010·Granted May 2, 2017·13 cites·19 claims
- 0588US9249013B2Silicon hardmask layer for directed self-assemblyBREWER SCIENCE INC·Filed 2013·Granted Feb 2, 2016·10 cites·23 claims
- 0687US7939244B2Photosensitive hardmask for microlithographyBREWER SCIENCE INC·Filed 2009·Granted May 10, 2011·11 cites·26 claims
- 0786US9123541B2Highly etch-resistant polymer block for use in block copolymers for directed self-assemblyBREWER SCIENCE INC·Filed 2014·Granted Sep 1, 2015·9 cites·53 claims
- 0884US6852473B2Anti-reflective coating conformality controlINFINEON TECHNOLOGIES RICHMOND·Filed 2003·Granted Feb 8, 2005·46 cites·20 claims
- 0984US6303270B1Highly plasma etch-resistant photoresist composition containing a photosensitive polymeric titania precursorUNIV MISSOURI·Filed 1999·Granted Oct 16, 2001·59 cites·48 claims
- 1083US7601483B2Anti-reflective coatings using vinyl ether crosslinkersBREWER SCIENCE INC·Filed 2006·Granted Oct 13, 2009·10 cites·29 claims
- 1181US7914974B2Anti-reflective imaging layer for multiple patterning processBREWER SCIENCE INC·Filed 2007·Granted Mar 29, 2011·7 cites·20 claims
- 1278US6869747B2Organic polymeric antireflective coatings deposited by chemical vapor depositionBREWER SCIENCE INC·Filed 2002·Granted Mar 22, 2005·15 cites·2 claims
- 1377US8206893B2Photoimageable branched polymerXU HAO·Filed 2008·Granted Jun 26, 2012·3 cites·16 claims
- 1475US11972948B2Adhesion layers for EUV lithographyBREWER SCIENCE INC·Filed 2019·Granted Apr 30, 2024·2 cites·29 claims
- 1574US7108958B2Photosensitive bottom anti-reflective coatingsBREWER SCIENCE INC·Filed 2003·Granted Sep 19, 2006·12 cites·59 claims
- 1673US6900000B2Organic polymeric antireflective coatings deposited by chemical vapor depositionBREWER SCIENCE INC·Filed 2002·Granted May 31, 2005·11 cites·35 claims
- 1769US12437993B2Adhesion layers for EUV lithographyBREWER SCIENCE INC·Filed 2024·Granted Oct 7, 2025·0 cites·20 claims
- 1857US7132219B2Polymeric antireflective coatings deposited by plasma enhanced chemical vapor depositionBREWER SCIENCE INC·Filed 2003·Granted Nov 7, 2006·5 cites·72 claims
- 1950US2009317747A1Anti-reflective coatings using vinyl ether crosslinkersGUERRERO DOUGLAS J·Filed 2009·Application pending·0 cites
- 2044US9638999B2Dual-layer light-sensitive developer-soluble bottom anti-reflective coatings for 193-nm lithographyMEADOR JIM D·Filed 2009·Granted May 2, 2017·0 cites·18 claims
- 2144US2005255410A1Anti-reflective coatings using vinyl ether crosslinkersGUERRERO DOUGLAS J·Filed 2005·Application pending·0 cites
- 2243US6936405B2Organic polymeric antireflective coatings deposited by chemical vapor depositionBREWER SCIENCE INC·Filed 2000·Granted Aug 30, 2005·5 cites·17 claims
- 2342US11361967B2Underlayers for EUV lithographyBREWER SCIENCE INC·Filed 2020·Granted Jun 14, 2022·0 cites·20 claims
- 2442US2007207406A1Anti-reflective coatings using vinyl ether crosslinkersGUERRERO DOUGLAS J·Filed 2007·Application pending·0 cites
- 2540US9110372B2Anti-reflective coatings using vinyl ether crosslinkersGUERRERO DOUGLAS J·Filed 2010·Granted Aug 18, 2015·0 cites·13 claims
- 2640US2003064608A1Polymeric antireflective coatings deposited by plasma enhanced chemical vapor depositionFiled 2002·Application pending·0 cites
- 2739US2003054117A1Polymeric antireflective coatings deposited by plasma enhanced chemical vapor depositionBREWER SCIENCE INC·Filed 2001·Application pending·0 cites
- 2829US2002132190A1Organic anti-reflective coatings deposited by chemical vapor deposition (CVD)Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →