Assignee
LIN QIN
US·3 granted patents·19 citations·filing 2010–2012
Top patents by PatentIndex Score
3 records- 0189US9640396B2Spin-on spacer materials for double- and triple-patterning lithographyLIN QIN·Filed 2010·Granted May 2, 2017·13 cites·19 claims
- 0280US8836082B2Reversal lithography approach by selective deposition of nanoparticlesLIN QIN·Filed 2011·Granted Sep 16, 2014·5 cites·21 claims
- 0366US8808969B2Method of making radiation-sensitive sol-gel materialsLIN QIN·Filed 2012·Granted Aug 19, 2014·1 cites·13 claims
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