Inventor · disambiguated record
Olga Regelman
Also filed as: REGELMAN OLGA
10 granted patents·3 pending applications·179 citations·filing 2001–2019
88Inventor score
Top patents by PatentIndex Score
13 records- 0198US10312056B2Distributed electrode array for plasma processingAPPLIED MATERIALS INC·Filed 2018·Granted Jun 4, 2019·39 cites·20 claims
- 0298US7196283B2Plasma reactor overhead source power electrode with low arcing tendency, cylindrical gas outlets and shaped surfaceAPPLIED MATERIALS INC·Filed 2005·Granted Mar 27, 2007·118 cites·48 claims
- 0391US10418225B2Distributed electrode array for plasma processingAPPLIED MATERIALS INC·Filed 2018·Granted Sep 17, 2019·4 cites·20 claims
- 0490US7777599B2Methods and apparatus for controlling characteristics of a plasmaAPPLIED MATERIALS INC·Filed 2007·Granted Aug 17, 2010·12 cites·33 claims
- 0579US10373807B2Distributed electrode array for plasma processingAPPLIED MATERIALS INC·Filed 2018·Granted Aug 6, 2019·1 cites·20 claims
- 0679US9799491B2Low electron temperature etch chamber with independent control over plasma density, radical composition and ion energy for atomic precision etchingAPPLIED MATERIALS INC·Filed 2016·Granted Oct 24, 2017·2 cites·7 claims
- 0772US9570275B2Heated showerhead assemblyAPPLIED MATERIALS INC·Filed 2014·Granted Feb 14, 2017·0 cites·13 claims
- 0867US10615004B2Distributed electrode array for plasma processingAPPLIED MATERIALS INC·Filed 2019·Granted Apr 7, 2020·0 cites·20 claims
- 0966US9196462B2Showerhead insulator and etch chamber linerAPPLIED MATERIALS INC·Filed 2012·Granted Nov 24, 2015·1 cites·23 claims
- 1061US8876024B2Heated showerhead assemblyCARDUCCI JAMES D·Filed 2008·Granted Nov 4, 2014·2 cites·11 claims
- 1159US2009178763A1Showerhead insulator and etch chamber linerAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 1251US2018053631A1Low Electron Temperature Etch Chamber with Independent Control Over Plasma Density, Radical Composition Ion Energy for Atomic Precision EtchingAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 1336US2003037879A1Top gas feed lid for semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →