Inventor · disambiguated record
Wolfgang Buschbeck
Also filed as: BUSCHBECK WOLFGANG
11 granted patents·17 pending applications·139 citations·filing 1992–2023
88Inventor score
Files withAPPLIED MATERIALS INC19LEYBOLD AG3GEBELE THOMAS2APPLIED MATERIALS GMBH & CO KG1LEYBOLD SYSTEMS GMBH1
Top patents by PatentIndex Score
28 records- 0192US10636687B2Apparatus for transportation of a substrate carrier in a vacuum chamber, system for vacuum processing of a substrate, and method for transportation of a substrate carrier in a vacuum chamberAPPLIED MATERIALS INC·Filed 2016·Granted Apr 28, 2020·9 cites·20 claims
- 0282US5228838AMethod for the evacuation of a low-vacuum chamber and of a HGH-vacuum chamber, as well as a high-vacuum apparatus for the practice thereofLEYBOLD AG·Filed 1992·Granted Jul 20, 1993·48 cites·4 claims
- 0376US12286703B2Evaporation apparatus, vapor deposition apparatus, and evaporation methodAPPLIED MATERIALS INC·Filed 2023·Granted Apr 29, 2025·0 cites·10 claims
- 0476US6004109AApparatus for the rapid evacuation of a vacuum chamberLEYBOLD AG·Filed 1996·Granted Dec 21, 1999·43 cites·4 claims
- 0569US5216742ALinear thermal evaporator for vacuum vapor depositing apparatusLEYBOLD AG·Filed 1992·Granted Jun 1, 1993·28 cites·4 claims
- 0667US2019112706A1Gas separation by adjustable separation wallAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 0764US9873945B2Common deposition platform, processing station, and method of operation thereofAPPLIED MATERIALS INC·Filed 2013·Granted Jan 23, 2018·1 cites·20 claims
- 0863US2022090256A1Evaporation apparatus, vapor deposition apparatus, and evaporation methodAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 0957US2009025885A1Evaporation apparatus with inclined crucibleAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 1056US2021381097A1Vapor deposition apparatus and method for coating a substrate in a vacuum chamberAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 1154US12060634B2Roller for transporting a flexible substrate, vacuum processing apparatus, and method of cooling a rollerAPPLIED MATERIALS INC·Filed 2021·Granted Aug 13, 2024·0 cites·16 claims
- 1254US11905589B2Material deposition apparatus having at least one heating assembly and method for pre- and/or post-heating a substrateAPPLIED MATERIALS INC·Filed 2020·Granted Feb 20, 2024·0 cites·12 claims
- 1353US2014208565A1Gas separation by adjustable separation wallAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 1453US2018100236A1Common deposition platform, processing station, and method of operation thereofAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 1551US6207028B1Sputtering device with a cathode with permanent magnet systemLEYBOLD SYSTEMS GMBH·Filed 1999·Granted Mar 27, 2001·10 cites·14 claims
- 1651US2011120862A1Anode rod for a sputtering systemAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 1750US2021147975A1Evaporation source for deposition of evaporated material on a substrate, deposition apparatus, method for measuring a vapor pressure of evaporated material, and method for determining an evaporation rate of an evaporated materialAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 1846US2009110809A1Hover cushion transport for webs in a web coating processAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 1945US7575662B2Method for operating a sputter cathode with a targetAPPLIED MATERIALS GMBH & CO KG·Filed 2005·Granted Aug 18, 2009·0 cites·14 claims
- 2044US2022356028A1Roller for transporting a flexible substrate, vacuum processing apparatus, and methods thereforAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 2142US2020165721A1Vacuum processing system and methods thereforMORRISON NEIL·Filed 2016·Application pending·0 cites
- 2242US2014212599A1Deposition source with adjustable electrodeAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 2340US8869967B2Dynamic load lock with cellular structure for discrete substratesAPPLIED MATERIALS INC·Filed 2013·Granted Oct 28, 2014·0 cites·24 claims
- 2439US2021363627A1Vacuum processing system and method of operating a vacuum processing systemAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 2538US2013171757A1Advanced platform for passivating crystalline silicon solar cellsPONNEKANTI HARI K·Filed 2013·Application pending·0 cites
- 2630US2012097093A1Load lock chamber, substrate processing system and method for ventingGEBELE THOMAS·Filed 2010·Application pending·0 cites
- 2728US2011220489A1Rotatable target, backing tube, sputtering installation and method for producing a rotatable targetAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 2826US2015179486A1Load lock chamber, substrate processing system and method for ventingGEBELE THOMAS·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →