Inventor · disambiguated record
Scott C. Holden
Also filed as: HOLDEN SCOTT · HOLDEN SCOTT C
18 granted patents·1 pending application·665 citations·filing 1982–2017
95Inventor score
Files withVARIAN ASSOCIATES8VARIAN SEMICONDUCTOR EQUIPMENT3VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3BROOKS AUTOMATION INC2EATON CORP1
Top patents by PatentIndex Score
19 records- 0196US4457359AApparatus for gas-assisted, solid-to-solid thermal transfer with a semiconductor waferVARIAN ASSOCIATES·Filed 1982·Granted Jul 3, 1984·159 cites·17 claims
- 0293US4508161AMethod for gas-assisted, solid-to-solid thermal transfer with a semiconductor waferVARIAN ASSOCIATES·Filed 1984·Granted Apr 2, 1985·104 cites·9 claims
- 0390US4542298AMethods and apparatus for gas-assisted thermal transfer with a semiconductor waferVARIAN ASSOCIATES·Filed 1983·Granted Sep 17, 1985·80 cites·14 claims
- 0487US9859098B2Temperature controlled ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Jan 2, 2018·5 cites·17 claims
- 0586US9108322B2Force sensing system for substrate lifting apparatusVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Aug 18, 2015·9 cites·20 claims
- 0684US5436790AWafer sensing and clamping monitorEATON CORP·Filed 1993·Granted Jul 25, 1995·99 cites·9 claims
- 0783US7655933B2Techniques for temperature-controlled ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Feb 2, 2010·8 cites·40 claims
- 0883US4535835AOptimum surface contour for conductive heat transfer with a thin flexible workpieceVARIAN ASSOCIATES·Filed 1984·Granted Aug 20, 1985·53 cites·10 claims
- 0978US7993698B2Techniques for temperature controlled ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Aug 9, 2011·5 cites·8 claims
- 1073US4458746AOptimum surface contour for conductive heat transfer with a thin flexible workpieceVARIAN ASSOCIATES·Filed 1982·Granted Jul 10, 1984·37 cites·5 claims
- 1171US5911896ASubstrate heating apparatus with glass-ceramic panels and thin film ribbon heater elementBROOKS AUTOMATION INC·Filed 1997·Granted Jun 15, 1999·37 cites·17 claims
- 1269US4504194AAir lock vacuum pumping methods and apparatusVARIAN ASSOCIATES·Filed 1982·Granted Mar 12, 1985·22 cites·4 claims
- 1367US4537244AMethod for optimum conductive heat transfer with a thin flexible workpieceVARIAN ASSOCIATES·Filed 1984·Granted Aug 27, 1985·27 cites·7 claims
- 1464US8149256B2Techniques for changing temperature of a platenFISH ROGER B·Filed 2008·Granted Apr 3, 2012·2 cites·17 claims
- 1558US10262833B2Temperature controlled ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Apr 16, 2019·0 cites·9 claims
- 1658US9673076B2System and method for rotational transfer of articles between vacuum and non-vacuum environmentsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2013·Granted Jun 6, 2017·2 cites·7 claims
- 1754US4475045ARapid pumpdown for high vacuum processingVARIAN ASSOCIATES·Filed 1983·Granted Oct 2, 1984·7 cites·7 claims
- 1848US2009196717A1Apparatus for Handling a Substrate and a Method ThereofHOLDEN SCOTT C·Filed 2009·Application pending·0 cites
- 1941US6046435AMethod of heating a substrate with multiple selectively deactuated heatersBROOKS AUTOMATION INC·Filed 1999·Granted Apr 4, 2000·9 cites·21 claims
Join the waitlist — get patent alerts
Get an alert when Scott C. Holden files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →