Inventor · disambiguated record
Stefan Lutter
Also filed as: LUTTER STEFAN
6 granted patents·3 pending applications·16 citations·filing 2002–2015
75Inventor score
Top patents by PatentIndex Score
9 records- 0163US9064686B2Method and apparatus for temporary bonding of ultra thin wafersGEORGE GREGORY·Filed 2013·Granted Jun 23, 2015·1 cites·15 claims
- 0257US6780767B2Semiconductor component in a wafer assemblyNANOWORLD AG·Filed 2002·Granted Aug 24, 2004·9 cites·7 claims
- 0343US2015251396A1Method and apparatus for temporary bonding of ultra thin wafersGEORGE GREGORY·Filed 2015·Application pending·0 cites
- 0441US6979407B2Process for producing an SPM sensorNANOWORLD AG·Filed 2003·Granted Dec 27, 2005·3 cites·7 claims
- 0541US6958124B2SPM sensor and process for producing itNANOWORLD AG·Filed 2003·Granted Oct 25, 2005·3 cites·6 claims
- 0635US2004207063A1Semiconductor component in a wafer assemblyFiled 2004·Application pending·0 cites
- 0730US6953751B2Micro device and process for producing itNANOWORLD AG·Filed 2003·Granted Oct 11, 2005·0 cites·7 claims
- 0829US2004007053A1SPM sensor and process for producing sameFiled 2003·Application pending·0 cites
- 0928US8353255B2Device for coating a substrateSUESS MICROTEC LITHOGRAPHY·Filed 2010·Granted Jan 15, 2013·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →