Assignee

SUESS MICROTEC LITHOGRAPHY

DE·2 granted patents·5 citations·filing 2005–2010

Technology mixH10P2 B05C1 G01B1 G03F1 G06T1

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2 records

0172US7567699B2Center determination of rotationally symmetrical alignment marksSUESS MICROTEC LITHOGRAPHY·Filed 2005·Granted Jul 28, 2009·5 cites·22 claims
0228US8353255B2Device for coating a substrateSUESS MICROTEC LITHOGRAPHY·Filed 2010·Granted Jan 15, 2013·0 cites·12 claims

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