Inventor · disambiguated record
Steven G. Sergi
Also filed as: SERGI STEVEN · SERGI STEVEN G
2 granted patents·2 pending applications·4 citations·filing 2009–2018
45Inventor score
Top patents by PatentIndex Score
4 records- 0180US9960042B2Carbon dopant gas and co-flow for implant beam and source life performance improvementENTEGRIS INC·Filed 2013·Granted May 1, 2018·4 cites·18 claims
- 0259US2011259366A1Ion source cleaning in semiconductor processing systemsADVANCED TECH MATERIALS·Filed 2009·Application pending·0 cites
- 0357US10354877B2Carbon dopant gas and co-flow for implant beam and source life performance improvementENTEGRIS INC·Filed 2018·Granted Jul 16, 2019·0 cites·15 claims
- 0437US2012111374A1Ion implantation tool cleaning apparatus and methodDESPRES JOSEPH R·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →