Inventor · disambiguated record
Naoaki Kobayashi
Also filed as: KOBAYASHI NAOAKI
6 granted patents·1 pending application·366 citations·filing 1980–2006
87Inventor score
Top patents by PatentIndex Score
7 records- 0195US5129958ACleaning method for semiconductor wafer processing apparatusAPPLIED MATERIALS INC·Filed 1991·Granted Jul 14, 1992·125 cites·20 claims
- 0292US5591494ADeposition of silicon nitrides by plasma-enhanced chemical vapor depositionAPPLIED MATERIALS INC·Filed 1996·Granted Jan 7, 1997·124 cites·8 claims
- 0389US5508067ADeposition of silicon nitride by plasma-enchanced chemical vapor depositionAPPLIED MATERIALS INC·Filed 1995·Granted Apr 16, 1996·89 cites·8 claims
- 0476US7288156B2Methods for cleaning a substrateLAM RES CORP·Filed 2006·Granted Oct 30, 2007·5 cites·16 claims
- 0569US7004181B2Apparatus for cleaning a substrateLAM RES CORP·Filed 2002·Granted Feb 28, 2006·12 cites·18 claims
- 0639US4290188AProcess for producing bipolar semiconductor device utilizing predeposition of dopant and a polycrystalline silicon-gold film followed by simultaneous diffusionFUJITSU LTD·Filed 1980·Granted Sep 22, 1981·11 cites·10 claims
- 0732US2003217762A1Water supply apparatus and method thereofLAM RES CORP·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →