Inventor · disambiguated record
Uwe Czarnetzki
Also filed as: CZARNETZKI UWE
2 granted patents·1 pending application·24 citations·filing 2008–2013
60Inventor score
Technology areasH01J
Top patents by PatentIndex Score
3 records- 0186US8933629B2Method for controlling ion energy in radio frequency plasmasRUHR UNIVERSITÄT BOCHUM·Filed 2013·Granted Jan 13, 2015·20 cites·17 claims
- 0269US8643280B2Method for controlling ion energy in radio frequency plasmasHEIL BRIAN GEORGE·Filed 2008·Granted Feb 4, 2014·4 cites·2 claims
- 0349US2012097641A1Method and device for plasma treatment of a flat substrateBECKMANN RUDOLF·Filed 2009·Application pending·0 cites
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