Assignee
BECKMANN RUDOLF
0 granted patents·3 pending applications·0 citations·filing 2004–2010
Top patents by PatentIndex Score
3 records- 0149US2012097641A1Method and device for plasma treatment of a flat substrateBECKMANN RUDOLF·Filed 2009·Application pending·0 cites
- 0237US2012180810A1Cleaning of a process chamberBECKMANN RUDOLF·Filed 2010·Application pending·0 cites
- 0337US2006099341A1High frequency plasma jet source and method for irradiating a surfaceBECKMANN RUDOLF·Filed 2004·Application pending·0 cites
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