Inventor · disambiguated record
Mark A. Mccord
Also filed as: MCCORD MARK · MCCORD MARK A · MCCORD MARK ARMSTRONG
71 granted patents·13 pending applications·954 citations·filing 1989–2024
99Inventor score
Top patents by PatentIndex Score
84 records- 0198US7514681B1Electrical process monitoring using mirror-mode electron microscopyKLA TENCOR TECH CORP·Filed 2006·Granted Apr 7, 2009·94 cites·32 claims
- 0298US7315022B1High-speed electron beam inspectionKLA TENCOR TECH CORP·Filed 2005·Granted Jan 1, 2008·59 cites·16 claims
- 0395US6597006B1Dual beam symmetric height systems and methodsKLA TENCOR TECH CORP·Filed 2001·Granted Jul 22, 2003·91 cites·25 claims
- 0494US9165742B1Inspection site preparationKLA TENCOR CORP·Filed 2015·Granted Oct 20, 2015·21 cites·33 claims
- 0594US8204296B2Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a waferBHASKAR KRIS·Filed 2010·Granted Jun 19, 2012·15 cites·16 claims
- 0693US10935637B2Lidar system including a transceiver arrayCEPTON TECHNOLOGIES INC·Filed 2020·Granted Mar 2, 2021·4 cites·20 claims
- 0793US10690754B2Scanning apparatuses and methods for a lidar systemCEPTON TECHNOLOGIES INC·Filed 2017·Granted Jun 23, 2020·15 cites·15 claims
- 0893US8194968B2Methods and systems for using electrical information for a device being fabricated on a wafer to perform one or more defect-related functionsPARK ALLEN·Filed 2008·Granted Jun 5, 2012·33 cites·85 claims
- 0993US7796804B2Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a waferKLA TENCOR CORP·Filed 2008·Granted Sep 14, 2010·25 cites·28 claims
- 1092US10845466B2Mounting apparatuses for optical components in a scanning lidar systemCEPTON TECHNOLOGIES INC·Filed 2017·Granted Nov 24, 2020·9 cites·17 claims
- 1192US10451740B2Scanning lidar systems for three-dimensional sensingCEPTON TECHNOLOGIES INC·Filed 2016·Granted Oct 22, 2019·9 cites·23 claims
- 1292US7171038B2Method and apparatus for inspecting a substrateKLA TENCOR TECH CORP·Filed 2001·Granted Jan 30, 2007·42 cites·5 claims
- 1391US6664546B1In-situ probe for optimizing electron beam inspection and metrology based on surface potentialKLA TENCOR·Filed 2000·Granted Dec 16, 2003·49 cites·31 claims
- 1489US10921431B2Apparatuses for scanning a lidar system in two dimensionsCEPTON TECHNOLOGIES INC·Filed 2018·Granted Feb 16, 2021·9 cites·18 claims
- 1588US11835656B2Methods for scanning a LiDAR system in two dimensionsCEPTON TECHNOLOGIES INC·Filed 2021·Granted Dec 5, 2023·2 cites·6 claims
- 1688US11150348B2Techniques for detecting cross-talk interferences in lidar imaging sensorsCEPTON TECHNOLOGIES INC·Filed 2020·Granted Oct 19, 2021·2 cites·20 claims
- 1788US10955530B2Systems for vibration cancellation in a lidar systemCEPTON TECHNOLOGIES INC·Filed 2017·Granted Mar 23, 2021·6 cites·20 claims
- 1888US8253119B1Well-based dynamic pattern generatorBRODIE ALAN D·Filed 2009·Granted Aug 28, 2012·14 cites·15 claims
- 1988US6828571B1Apparatus and methods of controlling surface charge and focusKLA TENCOR TECH CORP·Filed 2003·Granted Dec 7, 2004·40 cites·28 claims
- 2088US6774646B1Electron beam inspection system using multiple electron beams and uniform focus and deflection mechanismsKLA TENCOR CORP·Filed 2002·Granted Aug 10, 2004·28 cites·17 claims
- 2187US6064486ASystems, methods and computer program products for detecting the position of a new alignment mark on a substrate based on fitting to sample alignment signalsUNIV LELAND STANFORD JUNIOR·Filed 1998·Granted May 16, 2000·70 cites·48 claims
- 2286US11994631B2Calibration of LiDAR sensorsCEPTON TECHNOLOGIES INC·Filed 2020·Granted May 28, 2024·2 cites·13 claims
- 2386US10192716B2Multi-beam dark field imagingKLA TENCOR CORP·Filed 2016·Granted Jan 29, 2019·4 cites·21 claims
- 2486US9874597B2Light-emitting device test systemsKLA TENCOR CORP·Filed 2015·Granted Jan 23, 2018·4 cites·8 claims
- 2586US7714300B1High-speed high-efficiency solid-state electron detectorKLA TENCOR TECH CORP·Filed 2007·Granted May 11, 2010·8 cites·11 claims
- 2686US7660687B1Robust measurement of parametersKLA TENCOR CORP·Filed 2006·Granted Feb 9, 2010·8 cites·19 claims
- 2786US7091486B1Method and apparatus for beam current fluctuation correctionKLA TENCOR TECH CORP·Filed 2004·Granted Aug 15, 2006·23 cites·22 claims
- 2885US10325753B2Method and system for focus adjustment of a multi-beam scanning electron microscopy systemKLA TENCOR CORP·Filed 2016·Granted Jun 18, 2019·4 cites·14 claims
- 2985US6627884B2Simultaneous flooding and inspection for charge control in an electron beam inspection machineKLA TENCOR TECH CORP·Filed 2001·Granted Sep 30, 2003·29 cites·30 claims
- 3084US11300684B2Scanning lidar systems for three-dimensional sensingCEPTON TECHNOLOGIES INC·Filed 2019·Granted Apr 12, 2022·3 cites·20 claims
- 3184US10481266B2Multi-range three-dimensional imaging systemsCEPTON TECHNOLOGIES INC·Filed 2016·Granted Nov 19, 2019·6 cites·21 claims
- 3283US8373144B1Quasi-annular reflective electron patterning deviceKLA TENCOR CORP·Filed 2010·Granted Feb 12, 2013·5 cites·16 claims
- 3382US8106355B1Automated inspection using cell-cell subtraction perpendicular to stage motion directionLAUBER JAN·Filed 2008·Granted Jan 31, 2012·10 cites·5 claims
- 3482US7465922B1Accelerating electrostatic lens gun for high-speed electron beam inspectionKLA TENCOR TECH CORP·Filed 2006·Granted Dec 16, 2008·6 cites·10 claims
- 3581US4992728AElectrical probe incorporating scanning proximity microscopeIBM·Filed 1989·Granted Feb 12, 1991·52 cites·9 claims
- 3679US5932966AElectron sources utilizing patterned negative electron affinity photocathodesINTEVAC INC·Filed 1997·Granted Aug 3, 1999·34 cites·26 claims
- 3778US9170503B2Method and apparatus for inspecting a substrateADLER DAVID·Filed 2006·Granted Oct 27, 2015·4 cites·11 claims
- 3878US8089051B2Electron reflector with multiple reflective modesGRELLA LUCA·Filed 2010·Granted Jan 3, 2012·5 cites·14 claims
- 3978US7507959B2Method for charging substrate to a potentialKLA TENCOR TECH CORP·Filed 2006·Granted Mar 24, 2009·3 cites·6 claims
- 4075US9347824B2Light collection optics for measuring flux and spectrum from light-emitting devicesKLA TENCOR CORP·Filed 2014·Granted May 24, 2016·3 cites·17 claims
- 4175US8642981B1Electron microscope assembly for viewing the wafer plane image of an electron beam lithography toolKLA TENCOR CORP·Filed 2013·Granted Feb 4, 2014·3 cites·39 claims
- 4275US7446320B1Electronically-variable immersion electrostatic lensKLA TENCOR TECHNOLOGIES CORPRO·Filed 2005·Granted Nov 4, 2008·6 cites·13 claims
- 4374US5150392AX-ray mask containing a cantilevered tip for gap control and alignmentIBM·Filed 1991·Granted Sep 22, 1992·28 cites·5 claims
- 4472US11994621B2Mounting apparatuses for optical components in a scanning lidar systemCEPTON TECHNOLOGIES INC·Filed 2020·Granted May 28, 2024·0 cites·16 claims
- 4572US6586736B1Scanning electron beam microscope having an electrode for controlling charge build up during scanning of a sampleKLA TENCOR CORP·Filed 1999·Granted Jul 1, 2003·23 cites·17 claims
- 4672US2023375675A1Rotating lidar mirror having different surface widthsCEPTON TECHNOLOGIES INC·Filed 2023·Application pending·0 cites
- 4772US2023375674A1Multi-source lidarCEPTON TECHNOLOGIES INC·Filed 2023·Application pending·0 cites
- 4871US7176468B2Method for charging substrate to a potentialKLA TENCOR TECH CORP·Filed 2004·Granted Feb 13, 2007·7 cites·8 claims
- 4971US2023341522A1Rotational, reciprocating lidar scanningCEPTON TECHNOLOGIES INC·Filed 2023·Application pending·0 cites
- 5071US2023341519A1Folded flexure for linear lidar scanningCEPTON TECHNOLOGIES INC·Filed 2023·Application pending·0 cites
Showing the top 50 of 84 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →