Inventor · disambiguated record
William N. Partlo
Also filed as: PARTLO WILLIAM · PARTLO WILLIAM N · PARTLO WILLIAM NORMAN
169 granted patents·17 pending applications·8,833 citations·filing 1992–2025
99Inventor score
Top patents by PatentIndex Score
186 records- 0199US6567450B2Very narrow band, two chamber, high rep rate gas discharge laser systemCYMER INC·Filed 2001·Granted May 20, 2003·265 cites·52 claims
- 0299US6549551B2Injection seeded laser with precise timing controlCYMER INC·Filed 2001·Granted Apr 15, 2003·186 cites·11 claims
- 0399US6067311AExcimer laser with pulse multiplierCYMER INC·Filed 1998·Granted May 23, 2000·224 cites·13 claims
- 0498US8263953B2Systems and methods for target material delivery protection in a laser produced plasma EUV light sourceFOMENKOV IGOR V·Filed 2011·Granted Sep 11, 2012·43 cites·21 claims
- 0598US7671349B2Laser produced plasma EUV light sourceCYMER INC·Filed 2007·Granted Mar 2, 2010·54 cites·32 claims
- 0698US6690704B2Control system for a two chamber gas discharge laserCYMER INC·Filed 2002·Granted Feb 10, 2004·128 cites·38 claims
- 0798US6625191B2Very narrow band, two chamber, high rep rate gas discharge laser systemCYMER INC·Filed 2001·Granted Sep 23, 2003·236 cites·78 claims
- 0898US6566667B1Plasma focus light source with improved pulse power systemCYMER INC·Filed 2000·Granted May 20, 2003·185 cites·22 claims
- 0998US6208674B1Laser chamber with fully integrated electrode feedthrough main insulatorCYMER INC·Filed 1999·Granted Mar 27, 2001·187 cites·24 claims
- 1098US6128323AReliable modular production quality narrow-band high REP rate excimer laserCYMER INC·Filed 1998·Granted Oct 3, 2000·284 cites·56 claims
- 1198US6018537AReliable, modular, production quality narrow-band high rep rate F2 laserCYMER INC·Filed 1999·Granted Jan 25, 2000·280 cites·37 claims
- 1298US5991324AReliable. modular, production quality narrow-band KRF excimer laserCYMER INC·Filed 1998·Granted Nov 23, 1999·196 cites·16 claims
- 1398US5771258AAerodynamic chamber design for high pulse repetition rate excimer lasersCYMER INC·Filed 1997·Granted Jun 23, 1998·187 cites·14 claims
- 1498US5763930APlasma focus high energy photon sourceCYMER INC·Filed 1997·Granted Jun 9, 1998·192 cites·6 claims
- 1598US5729562APulse power generating circuit with energy recoveryCYMER INC·Filed 1996·Granted Mar 17, 1998·241 cites·64 claims
- 1697US8362391B2Laser thin film poly-silicon annealing optical systemTCZ LLC·Filed 2010·Granted Jan 29, 2013·55 cites·20 claims
- 1797US7885309B2Laser systemCYMER INC·Filed 2007·Granted Feb 8, 2011·37 cites·23 claims
- 1897US7643529B2Laser systemCYMER INC·Filed 2007·Granted Jan 5, 2010·35 cites·15 claims
- 1997US6972421B2Extreme ultraviolet light sourceCYMER INC·Filed 2003·Granted Dec 6, 2005·141 cites·78 claims
- 2097US6757316B2Four KHz gas discharge laserCYMER INC·Filed 2001·Granted Jun 29, 2004·97 cites·43 claims
- 2197US6477193B2Extreme repetition rate gas discharge laser with improved blower motorCYMER INC·Filed 2000·Granted Nov 5, 2002·155 cites·28 claims
- 2297US6317447B1Electric discharge laser with acoustic chirp correctionCYMER INC·Filed 2000·Granted Nov 13, 2001·108 cites·9 claims
- 2397US6016325AMagnetic modulator voltage and temperature timing compensation circuitCYMER INC·Filed 1998·Granted Jan 18, 2000·179 cites·11 claims
- 2496US12281324B2Exogenous gene expression in recombinant adenovirus for minimal impact on viral kineticsSALK INST FOR BIOLOGICAL STUDI·Filed 2022·Granted Apr 22, 2025·2 cites·35 claims
- 2596US7920616B2Laser systemCYMER INC·Filed 2007·Granted Apr 5, 2011·32 cites·17 claims
- 2696US7899095B2Laser lithography system with improved bandwidth controlCYMER INC·Filed 2008·Granted Mar 1, 2011·23 cites·20 claims
- 2796US7822092B2Laser systemCYMER INC·Filed 2007·Granted Oct 26, 2010·37 cites·15 claims
- 2896US7715459B2Laser systemCYMER INC·Filed 2007·Granted May 11, 2010·36 cites·30 claims
- 2996US7368741B2Extreme ultraviolet light sourceCYMER INC·Filed 2005·Granted May 6, 2008·65 cites·78 claims
- 3096US7164144B2EUV light sourceCYMER INC·Filed 2004·Granted Jan 16, 2007·113 cites·49 claims
- 3196US7154928B2Laser output beam wavefront splitter for bandwidth spectrum controlCYMER INC·Filed 2004·Granted Dec 26, 2006·62 cites·64 claims
- 3296US7087914B2High repetition rate laser produced plasma EUV light sourceCYMER INC·Filed 2004·Granted Aug 8, 2006·109 cites·42 claims
- 3396US6566668B2Plasma focus light source with tandem ellipsoidal mirror unitsCYMER INC·Filed 2001·Granted May 20, 2003·131 cites·27 claims
- 3496US6538737B2High resolution etalon-grating spectrometerCYMER INC·Filed 2001·Granted Mar 25, 2003·109 cites·8 claims
- 3596US6532247B2Laser wavelength control unit with piezoelectric driverCYMER INC·Filed 2001·Granted Mar 11, 2003·79 cites·17 claims
- 3696US6051841APlasma focus high energy photon sourceCYMER INC·Filed 1998·Granted Apr 18, 2000·139 cites·20 claims
- 3795US11401529B2Exogenous gene expression in recombinant adenovirus for minimal impact on viral kineticsSALK INST FOR BIOLOGICAL STUDI·Filed 2020·Granted Aug 2, 2022·3 cites·67 claims
- 3895US10738325B2Exogenous gene expression in therapeutic adenovirus for minimal impact on viral kineticsSALK INST FOR BIOLOGICAL STUDI·Filed 2018·Granted Aug 11, 2020·10 cites·20 claims
- 3995US8653437B2EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periodsPARTLO WILLIAM N·Filed 2011·Granted Feb 18, 2014·20 cites·21 claims
- 4095US8000212B2Metrology for extreme ultraviolet light sourceCYMER INC·Filed 2009·Granted Aug 16, 2011·25 cites·31 claims
- 4195US7630424B2Laser systemCYMER INC·Filed 2007·Granted Dec 8, 2009·24 cites·24 claims
- 4295US7247870B2Systems for protecting internal components of an EUV light source from plasma-generated debrisCYMER INC·Filed 2006·Granted Jul 24, 2007·28 cites·20 claims
- 4395US6815700B2Plasma focus light source with improved pulse power systemCYMER INC·Filed 2002·Granted Nov 9, 2004·113 cites·40 claims
- 4495US6452199B1Plasma focus high energy photon source with blast shieldCYMER INC·Filed 1999·Granted Sep 17, 2002·134 cites·39 claims
- 4595US6064072APlasma focus high energy photon sourceCYMER INC·Filed 1999·Granted May 16, 2000·190 cites·25 claims
- 4695US5936988AHigh pulse rate pulse power systemCYMER INC·Filed 1998·Granted Aug 10, 1999·154 cites·22 claims
- 4795US5233460AMethod and means for reducing speckle in coherent laser pulsesUNIV CALIFORNIA·Filed 1992·Granted Aug 3, 1993·168 cites·14 claims
- 4894US8847183B2System, method and apparatus for laser produced plasma extreme ultraviolet chamber with hot walls and cold collector mirrorCymer LLC·Filed 2013·Granted Sep 30, 2014·6 cites·19 claims
- 4994US8144740B1Laser systemBROWN DANIEL J W·Filed 2009·Granted Mar 27, 2012·37 cites·16 claims
- 5094US7884303B2Laser thin film poly-silicon annealing optical systemTCZ LLC·Filed 2005·Granted Feb 8, 2011·27 cites·16 claims
Showing the top 50 of 186 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →