Individual holder
FOMENKOV IGOR V
US·4 granted patents·71 citations·filing 2006–2011
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
4 records- 0198US8263953B2Systems and methods for target material delivery protection in a laser produced plasma EUV light sourceFOMENKOV IGOR V·Filed 2011·Granted Sep 11, 2012·43 cites·21 claims
- 0292US9029813B2Filter for material supply apparatus of an extreme ultraviolet light sourceFOMENKOV IGOR V·Filed 2011·Granted May 12, 2015·13 cites·42 claims
- 0377US8304752B2EUV light producing system and method utilizing an alignment laserFOMENKOV IGOR V·Filed 2009·Granted Nov 6, 2012·12 cites·30 claims
- 0469US8259764B2Bandwidth control deviceFOMENKOV IGOR V·Filed 2006·Granted Sep 4, 2012·3 cites·45 claims
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