Inventor · disambiguated record
Robert Chebi
Also filed as: CHEBI ROBERT · CHEBI ROBERT P
25 granted patents·12 pending applications·2,340 citations·filing 1991–2024
97Inventor score
Top patents by PatentIndex Score
37 records- 0198US8425682B2High strip rate downstream chamberLAM RES CORP·Filed 2012·Granted Apr 23, 2013·378 cites·16 claims
- 0298US7476291B2High chamber temperature process and chamber design for photo-resist stripping and post-metal etch passivationLAM RES CORP·Filed 2006·Granted Jan 13, 2009·529 cites·21 claims
- 0396US8298336B2High strip rate downstream chamberWANG ING-YANN·Filed 2005·Granted Oct 30, 2012·384 cites·28 claims
- 0496US5279865AHigh throughput interlevel dielectric gap filling processDIGITAL EQUIPMENT CORP·Filed 1991·Granted Jan 18, 1994·404 cites·14 claims
- 0594US6528427B2Methods for reducing contamination of semiconductor substratesLAM RES CORP·Filed 2001·Granted Mar 4, 2003·69 cites·31 claims
- 0694US6241845B1Apparatus for reducing process drift in inductive coupled plasma etching such as oxide layerLAM RES CORP·Filed 1999·Granted Jun 5, 2001·249 cites·15 claims
- 0792US5451543AStraight sidewall profile contact opening to underlying interconnect and method for making the sameMOTOROLA INC·Filed 1994·Granted Sep 19, 1995·147 cites·5 claims
- 0887US8598037B2Silicon etch with passivation using plasma enhanced oxidationWINNICZEK JAROSLAW W·Filed 2011·Granted Dec 3, 2013·7 cites·18 claims
- 0985US8043434B2Method and apparatus for removing photoresistLAM RES CORP·Filed 2008·Granted Oct 25, 2011·8 cites·17 claims
- 1085US7824519B2Variable volume plasma processing chamber and associated methodsLAM RES CORP·Filed 2007·Granted Nov 2, 2010·9 cites·11 claims
- 1184US8173547B2Silicon etch with passivation using plasma enhanced oxidationWINNICZEK JAROSLAW W·Filed 2008·Granted May 8, 2012·8 cites·19 claims
- 1281US9865472B2Fabrication of a silicon structure and deep silicon etch with profile controlLAM RES CORP·Filed 2016·Granted Jan 9, 2018·3 cites·13 claims
- 1381US9857307B2Elevated surface enhanced Raman spectroscopy resonator structures and method of making sameOPTOKEY INC·Filed 2016·Granted Jan 2, 2018·2 cites·19 claims
- 1481US6759336B1Methods for reducing contamination of semiconductor substratesLAM RES CORP·Filed 2002·Granted Jul 6, 2004·21 cites·19 claims
- 1580US9719931B2Surface enhanced raman spectroscopy resonator structures and methods of making sameOPTOKEY INC·Filed 2014·Granted Aug 1, 2017·4 cites·20 claims
- 1680US6048798AApparatus for reducing process drift in inductive coupled plasma etching such as oxide layerLAM RES CORP·Filed 1996·Granted Apr 11, 2000·64 cites·20 claims
- 1778US7547635B2Process for etching dielectric films with improved resist and/or etch profile characteristicsLAM RES CORP·Filed 2002·Granted Jun 16, 2009·21 cites·22 claims
- 1875US9330926B2Fabrication of a silicon structure and deep silicon etch with profile controlCHEBI ROBERT·Filed 2008·Granted May 3, 2016·7 cites·32 claims
- 1974US7605063B2Photoresist stripping chamber and methods of etching photoresist on substratesLAM RES CORP·Filed 2006·Granted Oct 20, 2009·5 cites·20 claims
- 2070US9018098B2Silicon etch with passivation using chemical vapor depositionWINNICZEK JAROSLAW W·Filed 2008·Granted Apr 28, 2015·3 cites·15 claims
- 2170US7083903B2Methods of etching photoresist on substratesLAM RES CORP·Filed 2003·Granted Aug 1, 2006·13 cites·35 claims
- 2264US10037883B2Enhanced productivity for an etch system through polymer managementAPPLIED MATERIALS INC·Filed 2014·Granted Jul 31, 2018·2 cites·13 claims
- 2362US9673069B2High frequency filter for improved RF bias signal stabilityAPPLIED MATERIALS INC·Filed 2013·Granted Jun 6, 2017·1 cites·14 claims
- 2458US9318341B2Methods for etching a substrateCHEBI ROBERT P·Filed 2011·Granted Apr 19, 2016·2 cites·20 claims
- 2557US2024411078A1Polarizer, diffraction grating and meta surface fabrication via ion implantationII VI DELAWARE INC·Filed 2024·Application pending·0 cites
- 2651US2008182422A1Methods of etching photoresist on substratesLAM RES CORP·Filed 2007·Application pending·0 cites
- 2747US2006201911A1Methods of etching photoresist on substratesLAM RES CORP·Filed 2006·Application pending·0 cites
- 2846US2011023779A1Variable Volume Plasma Processing Chamber and Associated MethodsLAM RES CORP·Filed 2010·Application pending·0 cites
- 2945US8757178B2Method and apparatus for removing photoresistCHEBI ROBERT P·Filed 2011·Granted Jun 24, 2014·0 cites·14 claims
- 3042US2006051965A1Methods of etching photoresist on substratesLAM RES CORP·Filed 2004·Application pending·0 cites
- 3141US2014261803A1High strip rate downstream chamberLAM RES CORP·Filed 2013·Application pending·0 cites
- 3240US2018059026A1Surface Enhanced Raman Spectroscopy (SERS) Structure For Double Resonance OutputOPTOKEY INC·Filed 2017·Application pending·0 cites
- 3339US2006073997A1Solutions for cleaning silicon semiconductors or silicon oxidesLAM RES CORP·Filed 2004·Application pending·0 cites
- 3434US2019225930A1Microfluidic filter devices and methodsHYSOCEAN INC·Filed 2017·Application pending·0 cites
- 3534US2019270960A1Microfluidic filter devices and methods of fabricating microfluidic filter devicesHYSOCEAN INC·Filed 2017·Application pending·0 cites
- 3630US2012103524A1Plasma processing apparatus with reduced effects of process chamber asymmetryCHEBI ROBERT·Filed 2011·Application pending·0 cites
- 3728US2012152900A1Methods and apparatus for gas delivery into plasma processing chambersCHEBI ROBERT P·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →