Inventor · disambiguated record
David K. Carlson
Also filed as: CARLSON DAVID · CARLSON DAVID K · CARLSON DAVID KEITH
95 granted patents·23 pending applications·2,924 citations·filing 1981–2021
99Inventor score
Files withAPPLIED MATERIALS INC91CARLSON DAVID K7SANCHEZ ERROL ANTONIO C4SANCHEZ ERROL3CARLSON DAVID KEITH2
Top patents by PatentIndex Score
118 records- 0198US9695508B2Liner assembly for chemical vapor deposition chamberAPPLIED MATERIALS INC·Filed 2015·Granted Jul 4, 2017·18 cites·20 claims
- 0298US8980005B2Liner assembly for chemical vapor deposition chamberCARLSON DAVID K·Filed 2011·Granted Mar 17, 2015·220 cites·20 claims
- 0397US8960235B2Gas dispersion apparatusCARLSON DAVID K·Filed 2011·Granted Feb 24, 2015·17 cites·18 claims
- 0497US8726837B2Semiconductor process chamber vision and monitoring systemPATALAY KAILASH K·Filed 2008·Granted May 20, 2014·553 cites·20 claims
- 0597US8313804B2Apparatus and methods for chemical vapor depositionCARLSON DAVID K·Filed 2011·Granted Nov 20, 2012·17 cites·18 claims
- 0697US8309440B2Method and apparatus for cleaning a substrate surfaceSANCHEZ ERROL ANTONIO C·Filed 2011·Granted Nov 13, 2012·233 cites·20 claims
- 0797US8008166B2Method and apparatus for cleaning a substrate surfaceAPPLIED MATERIALS INC·Filed 2008·Granted Aug 30, 2011·236 cites·20 claims
- 0895US7645339B2Silicon-containing layer deposition with silicon compoundsAPPLIED MATERIALS INC·Filed 2006·Granted Jan 12, 2010·14 cites·31 claims
- 0994US5607724ALow temperature high pressure silicon deposition methodAPPLIED MATERIALS INC·Filed 1995·Granted Mar 4, 1997·102 cites·6 claims
- 1093US5916369AGas inlets for wafer processing chamberAPPLIED MATERIALS INC·Filed 1995·Granted Jun 29, 1999·117 cites·9 claims
- 1192US9845550B2Upper dome with injection assemblyAPPLIED MATERIALS INC·Filed 2015·Granted Dec 19, 2017·7 cites·20 claims
- 1292US8603898B2Method for forming group III/V conformal layers on silicon substratesBAO XINYU·Filed 2012·Granted Dec 10, 2013·19 cites·20 claims
- 1392US7967911B2Apparatus and methods for chemical vapor depositionAPPLIED MATERIALS INC·Filed 2007·Granted Jun 28, 2011·12 cites·11 claims
- 1492US6476362B1Lamp array for thermal processing chamberAPPLIED MATERIALS INC·Filed 2000·Granted Nov 5, 2002·63 cites·35 claims
- 1592US5876797ALow temperature high pressure silicon deposition methodAPPLIED MATERIALS INC·Filed 1997·Granted Mar 2, 1999·81 cites·6 claims
- 1692US5700520ALow temperature, high pressure silicon deposition methodAPPLIED MATERIALS INC·Filed 1996·Granted Dec 23, 1997·78 cites·8 claims
- 1792US5421957ALow temperature etching in cold-wall CVD systemsAPPLIED MATERIALS INC·Filed 1993·Granted Jun 6, 1995·109 cites·22 claims
- 1892US5258824AIn-situ measurement of a thin film deposited on a waferAPPLIED MATERIALS INC·Filed 1992·Granted Nov 2, 1993·87 cites·24 claims
- 1991US7976634B2Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systemsAPPLIED MATERIALS INC·Filed 2007·Granted Jul 12, 2011·18 cites·15 claims
- 2091US7758697B2Silicon-containing layer deposition with silicon compoundsAPPLIED MATERIALS INC·Filed 2008·Granted Jul 20, 2010·10 cites·23 claims
- 2190US8150242B2Use of infrared camera for real-time temperature monitoring and controlMERRY NIR·Filed 2008·Granted Apr 3, 2012·14 cites·16 claims
- 2290US6455814B1Backside heating chamber for emissivity independent thermal processesAPPLIED MATERIALS INC·Filed 2001·Granted Sep 24, 2002·51 cites·17 claims
- 2389US11981999B2Supplemental energy for low temperature processesAPPLIED MATERIALS INC·Filed 2021·Granted May 14, 2024·1 cites·23 claims
- 2489US9512520B2Semiconductor substrate processing systemSANCHEZ ERROL ANTONIO C·Filed 2012·Granted Dec 6, 2016·9 cites·17 claims
- 2589US7540920B2Silicon-containing layer deposition with silicon compoundsAPPLIED MATERIALS INC·Filed 2003·Granted Jun 2, 2009·31 cites·72 claims
- 2689US5179677AApparatus and method for substrate heating utilizing various infrared means to achieve uniform intensityAPPLIED MATERIALS INC·Filed 1991·Granted Jan 12, 1993·125 cites·5 claims
- 2788US8663390B2Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systemsCARLSON DAVID KEITH·Filed 2011·Granted Mar 4, 2014·12 cites·21 claims
- 2887US10557203B2Temperature control system and process for gaseous precursor deliveryAPPLIED MATERIALS INC·Filed 2017·Granted Feb 11, 2020·4 cites·19 claims
- 2987US9322097B2EPI base ringAPPLIED MATERIALS INC·Filed 2013·Granted Apr 26, 2016·7 cites·14 claims
- 3086US8343317B2In situ cleaning of CVD System exhaustAPPLIED MATERIALS INC·Filed 2008·Granted Jan 1, 2013·5 cites·15 claims
- 3186US7560352B2Selective depositionAPPLIED MATERIALS INC·Filed 2006·Granted Jul 14, 2009·15 cites·34 claims
- 3286US7262116B2Low temperature epitaxial growth of silicon-containing films using close proximity UV radiationAPPLIED MATERIALS INC·Filed 2006·Granted Aug 28, 2007·9 cites·27 claims
- 3385US6254686B1Vented lower liner for heating exhaust gas from a single substrate reactorAPPLIED MATERIALS INC·Filed 2000·Granted Jul 3, 2001·28 cites·9 claims
- 3483US9159554B2Structure and method of forming metamorphic heteroepi materials and III-V channel structures on siAPPLIED MATERIALS INC·Filed 2014·Granted Oct 13, 2015·5 cites·17 claims
- 3583US6153260AMethod for heating exhaust gas in a substrate reactorAPPLIED MATERIALS INC·Filed 1997·Granted Nov 28, 2000·45 cites·6 claims
- 3682US10119192B2EPI base ringAPPLIED MATERIALS INC·Filed 2016·Granted Nov 6, 2018·3 cites·15 claims
- 3782US9768043B2Quartz upper and lower domesAPPLIED MATERIALS INC·Filed 2013·Granted Sep 19, 2017·4 cites·19 claims
- 3882US7709391B2Methods for in-situ generation of reactive etch and growth specie in film formation processesAPPLIED MATERIALS INC·Filed 2006·Granted May 4, 2010·8 cites·20 claims
- 3981US9534295B2Chamber pressure control apparatus for chemical vapor deposition systemsAPPLIED MATERIALS INC·Filed 2014·Granted Jan 3, 2017·1 cites·19 claims
- 4079US9347696B2Compact ampoule thermal management systemAPPLIED MATERIALS INC·Filed 2013·Granted May 24, 2016·1 cites·19 claims
- 4178US9396909B2Gas dispersion apparatusAPPLIED MATERIALS INC·Filed 2015·Granted Jul 19, 2016·3 cites·17 claims
- 4278US8501600B2Methods for depositing germanium-containing layersSANCHEZ ERROL·Filed 2011·Granted Aug 6, 2013·4 cites·20 claims
- 4377US5914050APurged lower linerAPPLIED MATERIALS INC·Filed 1997·Granted Jun 22, 1999·46 cites·24 claims
- 4476US8724976B2Use of infrared camera for real-time temperature monitoring and controlMERRY NIR·Filed 2012·Granted May 13, 2014·3 cites·20 claims
- 4576US6064799AMethod and apparatus for controlling the radial temperature gradient of a wafer while ramping the wafer temperatureAPPLIED MATERIALS INC·Filed 1998·Granted May 16, 2000·46 cites·50 claims
- 4675US9857028B2Chamber pressure control apparatus for chemical vapor deposition systemsAPPLIED MATERIALS INC·Filed 2016·Granted Jan 2, 2018·2 cites·20 claims
- 4775US9032990B2Chemical delivery systemJOSEPHSON MARCEL E·Filed 2012·Granted May 19, 2015·6 cites·20 claims
- 4875US8986454B2Window assembly for use in substrate processing systemsCARLSON DAVID K·Filed 2011·Granted Mar 24, 2015·3 cites·15 claims
- 4975US6500734B2Gas inlets for wafer processing chamberAPPLIED MATERIALS INC·Filed 1999·Granted Dec 31, 2002·45 cites·21 claims
- 5074US10458040B2Upper dome with injection assemblyAPPLIED MATERIALS INC·Filed 2017·Granted Oct 29, 2019·1 cites·20 claims
Showing the top 50 of 118 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →