Inventor · disambiguated record
Steve R. Lange
Also filed as: LANGE STEVE · LANGE STEVE R
5 granted patents·73 citations·filing 2000–2016
80Inventor score
Top patents by PatentIndex Score
5 records- 0185US6362923B1Lens for microscopic inspectionKLA TENCOR·Filed 2000·Granted Mar 26, 2002·36 cites·30 claims
- 0284US10324046B1Methods and systems for monitoring a non-defect related characteristic of a patterned waferKLA TENCOR CORP·Filed 2016·Granted Jun 18, 2019·5 cites·20 claims
- 0377US7142315B1Slit confocal autofocus systemKLA TENCOR TECH CORP·Filed 2004·Granted Nov 28, 2006·24 cites·18 claims
- 0469US8384887B2Methods and systems for inspection of a specimen using different inspection parametersKLA TENCOR TECH CORP·Filed 2010·Granted Feb 26, 2013·1 cites·41 claims
- 0568US7738089B2Methods and systems for inspection of a specimen using different inspection parametersKLA TENCOR TECH CORP·Filed 2004·Granted Jun 15, 2010·7 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →