Inventor · disambiguated record
Lanhua Wei
Also filed as: OPSAL JON · WEI LANHUA
18 granted patents·3 pending applications·380 citations·filing 1999–2017
95Inventor score
Top patents by PatentIndex Score
21 records- 0198US9470639B1Optical metrology with reduced sensitivity to grating anomaliesKLA TENCOR CORP·Filed 2016·Granted Oct 18, 2016·31 cites·20 claims
- 0297US6738138B2Small spot ellipsometerTHERMA WAVE INC·Filed 2002·Granted May 18, 2004·122 cites·23 claims
- 0391US10605722B2Metrology system calibration refinementKLA TENCOR CORP·Filed 2017·Granted Mar 31, 2020·5 cites·20 claims
- 0491US6281027B1Spatial averaging technique for ellipsometry and reflectometryTHERMA-WAVE INC·Filed 2000·Granted Aug 28, 2001·43 cites·9 claims
- 0590US7068370B2Optical inspection equipment for semiconductor wafers with precleaningTHERMA WAVE INC·Filed 2005·Granted Jun 27, 2006·12 cites·10 claims
- 0686US6515744B2Small spot ellipsometerTHERMA WAVE INC·Filed 2001·Granted Feb 4, 2003·29 cites·14 claims
- 0784US9857291B2Metrology system calibration refinementKLA TENCOR CORP·Filed 2014·Granted Jan 2, 2018·5 cites·21 claims
- 0879US6583875B1Monitoring temperature and sample characteristics using a rotating compensator ellipsometerTHERMA WAVE INC·Filed 2000·Granted Jun 24, 2003·22 cites·11 claims
- 0974US6930771B2Optical inspection equipment for semiconductor wafers with precleaningTHERMA WAVE INC·Filed 2003·Granted Aug 16, 2005·12 cites·7 claims
- 1073US6870621B2Small spot ellipsometerTHERMA WAVE INC·Filed 2004·Granted Mar 22, 2005·12 cites·12 claims
- 1171US7054006B2Self-calibrating beam profile ellipsometerTHERMA WAVE INC·Filed 2004·Granted May 30, 2006·14 cites·14 claims
- 1271US6714300B1Optical inspection equipment for semiconductor wafers with precleaningTHERMA WAVE INC·Filed 1999·Granted Mar 30, 2004·30 cites·19 claims
- 1370US6577384B2Spatial averaging technique for ellipsometry and reflectometryTHERMA WAVE INC·Filed 2001·Granted Jun 10, 2003·9 cites·8 claims
- 1469US6608689B1Combination thin-film stress and thickness measurement deviceTHERMA WAVE INC·Filed 1999·Granted Aug 19, 2003·26 cites·13 claims
- 1561US7342661B2Method for noise improvement in ellipsometersTHERMA WAVE INC·Filed 2005·Granted Mar 11, 2008·3 cites·10 claims
- 1658US6856385B2Spatial averaging technique for ellipsometry and reflectometryTHERMA WAVE INC·Filed 2003·Granted Feb 15, 2005·4 cites·8 claims
- 1750US6509199B2Spatial averaging technique for ellipsometry and reflectometryTHERMA WAVE INC·Filed 2001·Granted Jan 21, 2003·1 cites·19 claims
- 1841US2007076976A1Methods for eliminating artifacts in two-dimensional optical metrologyUHRICH CRAIG·Filed 2006·Application pending·0 cites
- 1940US6894781B2Monitoring temperature and sample characteristics using a rotating compensator ellipsometerTHERMA WAVE INC·Filed 2003·Granted May 17, 2005·0 cites·16 claims
- 2039US2003210394A1Combination thin-film stress and thickness measurement deviceFiled 2003·Application pending·0 cites
- 2137US2003184750A1Ellipsometer or reflectometer with elliptical apertureFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →