Inventor · disambiguated record
Fred Babian
Also filed as: BABIAN FRED · BABIAN FRED E
6 granted patents·4 pending applications·513 citations·filing 1987–2008
87Inventor score
Top patents by PatentIndex Score
10 records- 0196US5973323AApparatus and method for secondary electron emission microscopeKLA TENCOR CORP·Filed 1997·Granted Oct 26, 1999·138 cites·45 claims
- 0296US4845558AMethod and apparatus for detecting defects in repeated microminiature patternsKLA INSTR CORP·Filed 1987·Granted Jul 4, 1989·247 cites·14 claims
- 0388US6087659AApparatus and method for secondary electron emission microscopeKLA TENCOR CORP·Filed 1999·Granted Jul 11, 2000·44 cites·27 claims
- 0486US6141038AAlignment correction prior to image sampling in inspection systemsKLA INSTR CORP·Filed 1997·Granted Oct 31, 2000·82 cites·28 claims
- 0556US6713759B2Apparatus and method for secondary electron emission microscopeKLA TENCOR CORP·Filed 2001·Granted Mar 30, 2004·2 cites·8 claims
- 0648US2008304734A1Alignment correction prio to image sampling in inspection systemsKLA INSTR CORP·Filed 2008·Application pending·0 cites
- 0744US6984822B2Apparatus and method for secondary electron emission microscopeKLA TENCOR CORP·Filed 2003·Granted Jan 10, 2006·0 cites·23 claims
- 0844US2005254698A1Alignment correction prior to image sampling in inspection systemsKLA INSTR CORP·Filed 2005·Application pending·0 cites
- 0939US2002075385A1Alignment correction prior to image sampling in inspection systemsKLA INSTR CORP·Filed 2002·Application pending·0 cites
- 1039US2003063190A1Alignment correction prior to image sampling in inspection systemsKLA INSTR CORP·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →