Inventor · disambiguated record
Mitsunori Nakamori
Also filed as: NAKAMORI MITSUNORI
20 granted patents·10 pending applications·260 citations·filing 1998–2023
93Inventor score
Top patents by PatentIndex Score
30 records- 0195US6589338B1Device for processing substrateTOKYO ELECTRON LTD·Filed 2000·Granted Jul 8, 2003·110 cites·17 claims
- 0291US8043469B2Substrate processing method, substrate processing apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2007·Granted Oct 25, 2011·19 cites·1 claims
- 0387US9953840B2Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2016·Granted Apr 24, 2018·5 cites·11 claims
- 0486US6863741B2Cleaning processing method and cleaning processing apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Mar 8, 2005·37 cites·10 claims
- 0583US11938524B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Mar 26, 2024·1 cites·14 claims
- 0681US6979655B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2002·Granted Dec 27, 2005·22 cites·19 claims
- 0777US6348157B1Cleaning methodOHMI TADAHIRO·Filed 1998·Granted Feb 19, 2002·54 cites·6 claims
- 0874US10026629B2Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium storing substrate liquid processing programTOKYO ELECTRON LTD·Filed 2015·Granted Jul 17, 2018·2 cites·5 claims
- 0972US7914626B2Liquid processing method and liquid processing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Mar 29, 2011·4 cites·17 claims
- 1069US11935736B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Mar 19, 2024·2 cites·13 claims
- 1167US10727042B2Liquid processing method, substrate processing apparatus and recording mediumTOKYO ELECTRON LTD·Filed 2017·Granted Jul 28, 2020·1 cites·9 claims
- 1261US8978671B2Substrate processing method and substrate processing apparatusTANAKA SATORU·Filed 2011·Granted Mar 17, 2015·1 cites·8 claims
- 1358US2024047234A1Substrate processing apparatus, supply system, substrate processing method, and supply methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1455US11723259B2Substrate processing apparatus and method of processing substrateTOKYO ELECTRON LTD·Filed 2021·Granted Aug 8, 2023·0 cites·12 claims
- 1552US2024307821A1Substrate processing system and substrate processing methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 1648US2009191716A1Polysilicon layer removing method and storage mediumTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 1748US2006163205A1Substrate processing method and substrate processing apparatusNIUYA TAKAYUKI·Filed 2005·Application pending·0 cites
- 1847US2024128307A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 1946US7731799B2Substrate processing method, substrate processing apparatus and computer-readable memory mediumTOKYO ELECTRON LTD·Filed 2004·Granted Jun 8, 2010·1 cites·23 claims
- 2045US7767006B2Ozone processing apparatus and ozone processing methodTOKYO ELECTRON LTD·Filed 2004·Granted Aug 3, 2010·1 cites·4 claims
- 2142US9095953B2Apparatus for polishing rear surface of substrate, system for polishing rear surface of substrate, method for polishing rear surface of substrate and recording medium having program for polishing rear surface of substrateNAKAMORI MITSUNORI·Filed 2011·Granted Aug 4, 2015·0 cites·9 claims
- 2242US7693597B2Computer readable storage medium for controlling substrate processing apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Apr 6, 2010·0 cites·11 claims
- 2340US2014377463A1Liquid processing method, liquid processing apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 2438US2019228963A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 2537US10867814B2Liquid processing method, substrate processing apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Dec 15, 2020·0 cites·17 claims
- 2637US10366877B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Jul 30, 2019·0 cites·8 claims
- 2736US8617656B2Liquid processing apparatus, liquid processing method, and storage mediumNAKAMORI MITSUNORI·Filed 2010·Granted Dec 31, 2013·0 cites·5 claims
- 2834US2017316961A1Substrate liquid processing method, substrate liquid processing apparatus, and computer-readable storage medium that stores substrate liquid processing programTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 2933US2017301534A1Substrate liquid processing method, substrate liquid processing apparatus, and computer-readable storage medium that stores substrate liquid processing programTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 3031US2012164339A1Substrate Liquid Processing Apparatus, Substrate Liquid Processing Method and Computer Readable Recording Medium Having Substrate Liquid Processing ProgramNAKAMORI MITSUNORI·Filed 2011·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Mitsunori Nakamori files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →