Inventor · disambiguated record
Michael E. Scaman
Also filed as: SCAMAN MICHAEL · SCAMAN MICHAEL E · SCAMAN MICHAEL EDWARD
22 granted patents·1 pending application·244 citations·filing 1994–2009
95Inventor score
Top patents by PatentIndex Score
23 records- 0192US7353472B2System and method for testing pattern sensitive algorithms for semiconductor designIBM·Filed 2005·Granted Apr 1, 2008·14 cites·10 claims
- 0291US7187179B1Wiring test structures for determining open and short circuits in semiconductor devicesIBM·Filed 2005·Granted Mar 6, 2007·28 cites·13 claims
- 0389US7360199B2Iterative method for refining integrated circuit layout using compass optical proximity correction (OPC)IBM·Filed 2006·Granted Apr 15, 2008·10 cites·7 claims
- 0480US8161421B2Calibration and verification structures for use in optical proximity correctionVISWANATHAN RAMYA·Filed 2008·Granted Apr 17, 2012·10 cites·9 claims
- 0579US5821759AMethod and apparatus for detecting shorts in a multi-layer electronic packageIBM·Filed 1997·Granted Oct 13, 1998·44 cites·31 claims
- 0676US6242923B1Method for detecting power plane-to-power plane shorts and I/O net-to power plane shorts in modules and printed circuit boardsIBM·Filed 1998·Granted Jun 5, 2001·37 cites·29 claims
- 0769US6400128B2Thermal modulation system and method for locating a circuit defectIBM·Filed 2001·Granted Jun 4, 2002·12 cites·17 claims
- 0865US6800864B2Method and structure for reducing effects of noise and resonance associated with an e-beam lithography toolIBM·Filed 2002·Granted Oct 5, 2004·6 cites·6 claims
- 0965US6141093AMethod and apparatus for locating power plane shorts using polarized light microscopyIBM·Filed 1998·Granted Oct 31, 2000·31 cites·20 claims
- 1064US8201132B2System and method for testing pattern sensitive algorithms for semiconductor designDEMARIS DAVID L·Filed 2009·Granted Jun 12, 2012·1 cites·8 claims
- 1160US8174681B2Calibration of lithographic process modelsGRAUR IOANA·Filed 2009·Granted May 8, 2012·1 cites·10 claims
- 1258US7975246B2MEEF reduction by elongation of square shapesIBM·Filed 2008·Granted Jul 5, 2011·1 cites·20 claims
- 1356US7685544B2Testing pattern sensitive algorithms for semiconductor designIBM·Filed 2007·Granted Mar 23, 2010·0 cites·10 claims
- 1454US7673279B2Iterative method for refining integrated circuit layout using compass optical proximity correction (OPC)IBM·Filed 2008·Granted Mar 2, 2010·0 cites·13 claims
- 1554US5818239ASimplified contactless test of MCM thin film I/O nets using a plasmaIBM·Filed 1997·Granted Oct 6, 1998·15 cites·10 claims
- 1649US6781141B2Method and structure for detection and measurement of electrical and mechanical resonance associated with an E-beam lithography toolIBM·Filed 2002·Granted Aug 24, 2004·1 cites·8 claims
- 1745US6005966AMethod and apparatus for multi-stream detection of high density metalization layers of multilayer structures having low contrastIBM·Filed 1997·Granted Dec 21, 1999·11 cites·6 claims
- 1845US2009191468A1Contact Level Mask Layouts By Introducing Anisotropic Sub-Resolution Assist FeaturesIBM·Filed 2008·Application pending·0 cites
- 1941US5448650AThin-film latent open optical detection with template-based feature extractionIBM·Filed 1994·Granted Sep 5, 1995·12 cites·29 claims
- 2039US6785615B2Method and structure for detection of electromechanical problems using variance statistics in an E-beam lithography deviceIBM·Filed 2002·Granted Aug 31, 2004·0 cites·20 claims
- 2139US5936408ASimplified contactless test of MCM thin film I/O nets using a plasmaIBM·Filed 1998·Granted Aug 10, 1999·6 cites·16 claims
- 2235US6236196B1Thermal modulation system and method for locating a circuit defect such as a short or incipient open independent of a circuit geometryIBM·Filed 1999·Granted May 22, 2001·4 cites·25 claims
- 2333US7808257B2Ionization test for electrical verificationIBM·Filed 2003·Granted Oct 5, 2010·0 cites·63 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →