Inventor · disambiguated record
Xie Shao
Also filed as: SHAO XIE
17 granted patents·6 pending applications·777 citations·filing 1994–2012
96Inventor score
Files withBREWER SCIENCE INC17
Top patents by PatentIndex Score
23 records- 0196US7026237B2Fill material for dual damascene processesBREWER SCIENCE INC·Filed 2004·Granted Apr 11, 2006·60 cites·18 claims
- 0296US5919599AThermosetting anti-reflective coatings at deep ultravioletBREWER SCIENCE INC·Filed 1997·Granted Jul 6, 1999·157 cites·19 claims
- 0394US6391472B1Fill material for dual damascene processesBREWER SCIENCE INC·Filed 2001·Granted May 21, 2002·45 cites·11 claims
- 0494US5693691AThermosetting anti-reflective coatings compositionsBREWER SCIENCE INC·Filed 1995·Granted Dec 2, 1997·166 cites·22 claims
- 0591US5935760AThermosetting polyester anti-reflective coatings for multilayer photoresist processesBREWER SCIENCE INC·Filed 1997·Granted Aug 10, 1999·84 cites·21 claims
- 0690US5892096ANon-subliming mid-UV dyes and ultra-thin organic arcs having differential solubilityBREWER SCIENCE INC·Filed 1996·Granted Apr 6, 1999·36 cites·2 claims
- 0788US6316160B1Fast-etching, thermosetting anti-reflective coatings derived from cellulosic bindersBREWER SCIENCE INC·Filed 2000·Granted Nov 13, 2001·33 cites·9 claims
- 0888US5688987ANon-subliming Mid-UV dyes and ultra-thin organic arcs having differential solubilityBREWER SCIENCE INC·Filed 1994·Granted Nov 18, 1997·26 cites·3 claims
- 0982US5919598AMethod for making multilayer resist structures with thermosetting anti-reflective coatingsBREWER SCIENCE INC·Filed 1996·Granted Jul 6, 1999·62 cites·1 claims
- 1077US6962769B2Anti-reflective coating composition with improved spin bowl compatibilityBREWER SCIENCE INC·Filed 2003·Granted Nov 8, 2005·16 cites·73 claims
- 1175US6080530AThermosetting polyester anti-reflective coatings for multilayer photoresist processesBREWER SCIENCE INC·Filed 1999·Granted Jun 27, 2000·39 cites·2 claims
- 1273US8865599B2Self-leveling planarization materials for microelectronic topographyBREWER SCIENCE INC·Filed 2012·Granted Oct 21, 2014·3 cites·27 claims
- 1371US6670425B2Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide ringsBREWER SCIENCE INC·Filed 2001·Granted Dec 30, 2003·9 cites·5 claims
- 1464US6042990AThermosetting polyester anti-reflective coatings for multilayer photoresist processesBREWER SCIENCE INC·Filed 1999·Granted Mar 28, 2000·24 cites·3 claims
- 1556US7132216B2Non-aromatic chromophores for use in polymer anti-reflective coatingsBREWER SCIENCE INC·Filed 2003·Granted Nov 7, 2006·12 cites·9 claims
- 1645US7998318B2Crosslinkable fill compositions for uniformly protecting via and contact holesBREWER SCIENCE INC·Filed 2004·Granted Aug 16, 2011·0 cites·18 claims
- 1745US6663916B2Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide ringsBREWER SCIENCE INC·Filed 2002·Granted Dec 16, 2003·5 cites·8 claims
- 1842US2002183426A1Crosslinkable fill compositions for uniformly protecting via and contact holesFiled 2002·Application pending·0 cites
- 1942US2003148601A1Fill material for dual damascene processesFiled 2003·Application pending·0 cites
- 2041US2001056144A1Fill material for dual damascene processesFiled 2001·Application pending·0 cites
- 2141US2002016057A1Fill material for dual damascene processesFiled 2001·Application pending·0 cites
- 2241US2004034134A1Crosslinkable fill compositions for uniformly protecting via and contact holesFiled 2003·Application pending·0 cites
- 2330US2002045125A1Non-aromatic chromophores for use in polymer anti-reflective coatingsFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →