Inventor · disambiguated record
Qingpo Xi
Also filed as: XI QINGPO
12 granted patents·4 pending applications·43 citations·filing 2008–2023
86Inventor score
Top patents by PatentIndex Score
16 records- 0195US11469074B2Multiple charged-particle beam apparatus with low crosstalkASML NETHERLANDS BV·Filed 2020·Granted Oct 11, 2022·3 cites·18 claims
- 0293US7960697B2Electron beam apparatusHERMES MICROVISION INC·Filed 2008·Granted Jun 14, 2011·24 cites·20 claims
- 0392US12033830B2Multiple charged-particle beam apparatus with low crosstalkASML NETHERLANDS BV·Filed 2022·Granted Jul 9, 2024·1 cites·20 claims
- 0488US8895935B2High efficiency secondary and back scattered electron detectorWANG ZHIBIN·Filed 2012·Granted Nov 25, 2014·11 cites·26 claims
- 0581US12191109B2Sample pre-charging methods and apparatuses for charged particle beam inspectionASML NETHERLANDS BV·Filed 2023·Granted Jan 7, 2025·0 cites·19 claims
- 0677US9581245B2Metal seal for ultra high vacuum systemXI QINGPO·Filed 2012·Granted Feb 28, 2017·4 cites·6 claims
- 0773US2023280293A1System and method for aligning electron beams in multi-beam inspection apparatusASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0866US2023107989A1Replaceable module for a charged particle apparatusASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0962US11961698B2Replaceable module for a charged particle apparatusASML NETHERLANDS BV·Filed 2021·Granted Apr 16, 2024·0 cites·20 claims
- 1062US11614416B2System and method for aligning electron beams in multi-beam inspection apparatusASML NETHERLANDS BV·Filed 2019·Granted Mar 28, 2023·0 cites·15 claims
- 1161US11676792B2Sample pre-charging methods and apparatuses for charged particle beam inspectionASML NETHERLANDS BV·Filed 2018·Granted Jun 13, 2023·0 cites·16 claims
- 1257US12165830B2Multiple charged-particle beam apparatus with low crosstalkASML NETHERLANDS BV·Filed 2022·Granted Dec 10, 2024·0 cites·20 claims
- 1357US9605759B2Metal seal for ultra high vacuum systemHERMES MICROVISION INC·Filed 2014·Granted Mar 28, 2017·0 cites·1 claims
- 1455US2023317402A1Electron-optical assembly comprising electromagnetic shieldingASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1554US12278081B2System and method for alignment of secondary beams in multi-beam inspection apparatusASML NETHERLANDS BV·Filed 2020·Granted Apr 15, 2025·0 cites·19 claims
- 1643US2025003505A1Valves with reduced particle generation and increased cycle lifeASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →