Inventor · disambiguated record
Liequan Lee
Also filed as: LEE LIEQUAN
13 granted patents·1 pending application·36 citations·filing 2014–2022
88Inventor score
Top patents by PatentIndex Score
14 records- 0192US11099137B2Visualization of three-dimensional semiconductor structuresKLA CORP·Filed 2020·Granted Aug 24, 2021·3 cites·21 claims
- 0290US9412673B2Multi-model metrologyKLA TENCOR CORP·Filed 2014·Granted Aug 9, 2016·10 cites·25 claims
- 0388US11156548B2Measurement methodology of advanced nanostructuresKLA TENCOR CORP·Filed 2018·Granted Oct 26, 2021·6 cites·20 claims
- 0486US11378451B2Bandgap measurements of patterned film stacks using spectroscopic metrologyKLA TENCOR CORP·Filed 2017·Granted Jul 5, 2022·3 cites·44 claims
- 0585US10794839B2Visualization of three-dimensional semiconductor structuresKLA TENCOR CORP·Filed 2019·Granted Oct 6, 2020·4 cites·21 claims
- 0684US10732515B2Detection and measurement of dimensions of asymmetric structuresKLA TENCOR CORP·Filed 2018·Granted Aug 4, 2020·3 cites·20 claims
- 0775US10393647B1System, method, and computer program product for automatically determining a parameter causing an abnormal semiconductor metrology measurementKLA TENCOR CORP·Filed 2014·Granted Aug 27, 2019·4 cites·17 claims
- 0875US10190868B2Metrology system, method, and computer program product employing automatic transitioning between utilizing a library and utilizing regression for measurement processingKLA TENCOR CORP·Filed 2015·Granted Jan 29, 2019·2 cites·11 claims
- 0971US11796390B2Bandgap measurements of patterned film stacks using spectroscopic metrologyKLA CORP·Filed 2022·Granted Oct 24, 2023·0 cites·14 claims
- 1066US11380594B2Automatic optimization of measurement accuracy through advanced machine learning techniquesKLA TENCOR CORP·Filed 2018·Granted Jul 5, 2022·1 cites·20 claims
- 1147US2016322267A1Multi-model metrologyKLA TENCOR CORP·Filed 2016·Application pending·0 cites
- 1244US11422095B2Scatterometry modeling in the presence of undesired diffraction ordersKLA TENCOR CORP·Filed 2019·Granted Aug 23, 2022·0 cites·31 claims
- 1342US10678226B1Adaptive numerical aperture control method and systemKLA TENCOR CORP·Filed 2016·Granted Jun 9, 2020·0 cites·18 claims
- 1438US10648793B2Library expansion system, method, and computer program product for metrologyKLA TENCOR CORP·Filed 2015·Granted May 12, 2020·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →