Inventor · disambiguated record
Kirthi Kattige
Also filed as: KATTIGE KIRTHI · KATTIGE KIRTHI K
4 granted patents·213 citations·filing 2011–2017
83Inventor score
Technology areasH10W
Top patents by PatentIndex Score
4 records- 0198US10043655B2Plasma activated conformal dielectric film depositionNOVELLUS SYSTEMS INC·Filed 2017·Granted Aug 7, 2018·28 cites·20 claims
- 0298US9570274B2Plasma activated conformal dielectric film depositionNOVELLUS SYSTEMS INC·Filed 2015·Granted Feb 14, 2017·30 cites·11 claims
- 0397US8999859B2Plasma activated conformal dielectric film depositionNOVELLUS SYSTEMS INC·Filed 2013·Granted Apr 7, 2015·56 cites·25 claims
- 0497US8637411B2Plasma activated conformal dielectric film depositionSWAMINATHAN SHANKAR·Filed 2011·Granted Jan 28, 2014·99 cites·44 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →