Assignee
SWAMINATHAN SHANKAR
US·2 granted patents·687 citations·filing 2011–2012
Top patents by PatentIndex Score
2 records- 0198US8956983B2Conformal doping via plasma activated atomic layer deposition and conformal film depositionSWAMINATHAN SHANKAR·Filed 2012·Granted Feb 17, 2015·588 cites·41 claims
- 0297US8637411B2Plasma activated conformal dielectric film depositionSWAMINATHAN SHANKAR·Filed 2011·Granted Jan 28, 2014·99 cites·44 claims
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