Inventor · disambiguated record
Anna Golotsvan
Also filed as: GOLOTSVAN ANNA
13 granted patents·1 pending application·16 citations·filing 2018–2023
85Inventor score
Top patents by PatentIndex Score
14 records- 0192US12001148B2Enhancing performance of overlay metrologyKLA CORP·Filed 2023·Granted Jun 4, 2024·2 cites·26 claims
- 0292US11761969B2System and method for analyzing a sample with a dynamic recipe based on iterative experimentation and feedbackKLA CORP·Filed 2020·Granted Sep 19, 2023·4 cites·25 claims
- 0392US11353799B1System and method for error reduction for metrology measurementsKLA CORP·Filed 2020·Granted Jun 7, 2022·5 cites·25 claims
- 0489US11726410B2Multi-resolution overlay metrology targetsKLA CORP·Filed 2021·Granted Aug 15, 2023·2 cites·22 claims
- 0587US11809090B2Composite overlay metrology targetKLA CORP·Filed 2020·Granted Nov 7, 2023·2 cites·49 claims
- 0683US11592755B2Enhancing performance of overlay metrologyKLA CORP·Filed 2021·Granted Feb 28, 2023·1 cites·30 claims
- 0780US12013634B2Reduction or elimination of pattern placement error in metrology measurementsKLA TENCOR CORP·Filed 2022·Granted Jun 18, 2024·0 cites·11 claims
- 0874US11537043B2Reduction or elimination of pattern placement error in metrology measurementsKLA TENCOR CORP·Filed 2021·Granted Dec 27, 2022·0 cites·10 claims
- 0956US2019250504A1Reduction or elimination of pattern placement error in metrology measurementsKLA TENCOR CORP·Filed 2018·Application pending·0 cites
- 1048US12222199B2Systems and methods for measurement of misregistration and amelioration thereofKLA CORP·Filed 2020·Granted Feb 11, 2025·0 cites·22 claims
- 1146US11862521B2Multiple-tool parameter set calibration and misregistration measurement system and methodKLA CORP·Filed 2020·Granted Jan 2, 2024·0 cites·24 claims
- 1246US11615974B2Fab management with dynamic sampling plans, optimized wafer measurement paths and optimized wafer transport, using quantum computingKLA CORP·Filed 2019·Granted Mar 28, 2023·0 cites·30 claims
- 1342US11353493B2Data-driven misregistration parameter configuration and measurement system and methodKLA TENCOR CORP·Filed 2019·Granted Jun 7, 2022·0 cites·19 claims
- 1438US11551980B2Dynamic amelioration of misregistration measurementKLA TENCOR CORP·Filed 2019·Granted Jan 10, 2023·0 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →