Inventor · disambiguated record
Brown C. Peethala
Also filed as: PEETHALA BROWN · PEETHALA BROWN C · PEETHALA BROWN CORNELIUS
15 granted patents·2 pending applications·161 citations·filing 2013–2019
92Inventor score
Top patents by PatentIndex Score
17 records- 0198US9349687B1Advanced manganese/manganese nitride cap/etch mask for air gap formation scheme in nanocopper low-K interconnectIBM·Filed 2015·Granted May 24, 2016·96 cites·20 claims
- 0295US9613862B2Chamferless via structuresIBM·Filed 2015·Granted Apr 4, 2017·14 cites·19 claims
- 0395US9373543B1Forming interconnect features with reduced sidewall taperingGLOBALFOUNDRIES INC·Filed 2015·Granted Jun 21, 2016·19 cites·20 claims
- 0491US9190285B1Rework and stripping of complex patterning layers using chemical mechanical polishingIBM·Filed 2014·Granted Nov 17, 2015·11 cites·19 claims
- 0589US9390967B2Method for residue-free block pattern transfer onto metal interconnects for air gap formationIBM·Filed 2014·Granted Jul 12, 2016·9 cites·19 claims
- 0688US10032668B2Chamferless via structuresIBM·Filed 2017·Granted Jul 24, 2018·4 cites·18 claims
- 0785US9508560B1SiARC removal with plasma etch and fluorinated wet chemical solution combinationIBM·Filed 2015·Granted Nov 29, 2016·4 cites·20 claims
- 0875US10388565B2Chamferless via structuresIBM·Filed 2018·Granted Aug 20, 2019·1 cites·18 claims
- 0973US9799559B1Methods employing sacrificial barrier layer for protection of vias during trench formationGLOBALFOUNDRIES INC·Filed 2016·Granted Oct 24, 2017·2 cites·20 claims
- 1064US9378966B2Selective etching of silicon waferIBM·Filed 2014·Granted Jun 28, 2016·1 cites·18 claims
- 1163US10937694B2Chamferless via structuresIBM·Filed 2019·Granted Mar 2, 2021·0 cites·20 claims
- 1263US10903118B2Chamferless via structuresIBM·Filed 2019·Granted Jan 26, 2021·0 cites·19 claims
- 1355US10957588B2Chamferless via structuresIBM·Filed 2016·Granted Mar 23, 2021·0 cites·20 claims
- 1447US9934980B2Rework and stripping of complex patterning layers using chemical mechanical polishingIBM·Filed 2015·Granted Apr 3, 2018·0 cites·17 claims
- 1544US10658176B2Methods of mitigating cobalt diffusion in contact structures and the resulting devicesGLOBALFOUNDRIES INC·Filed 2018·Granted May 19, 2020·0 cites·18 claims
- 1643US2015357207A1Selective etching of silicon waferIBM·Filed 2015·Application pending·0 cites
- 1742US2013200040A1Titanium nitride removalIBM·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →