Inventor · disambiguated record
Tomomi Komura
Also filed as: KOMURA TOMOMI
4 granted patents·59 citations·filing 2006–2011
78Inventor score
Top patents by PatentIndex Score
4 records- 0194US7930058B2Nanotopography control and optimization using feedback from warp dataMEMC ELECTRONIC MATERIALS·Filed 2007·Granted Apr 19, 2011·28 cites·19 claims
- 0288US7601049B2Double side wafer grinder and methods for assessing workpiece nanotopologyMEMC ELECTRONIC MATERIALS·Filed 2006·Granted Oct 13, 2009·15 cites·28 claims
- 0385US8145342B2Methods and systems for adjusting operation of a wafer grinder using feedback from warp dataBHAGAVAT SUMEET S·Filed 2010·Granted Mar 27, 2012·8 cites·34 claims
- 0484US8712575B2Hydrostatic pad pressure modulation in a simultaneous double side wafer grinderBHAGAVAT SUMEET S·Filed 2011·Granted Apr 29, 2014·8 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →