Inventor · disambiguated record
Tetsuya Kawajiri
Also filed as: KAWAJIRI TETSUYA
15 granted patents·5 pending applications·125 citations·filing 1999–2022
91Inventor score
Top patents by PatentIndex Score
20 records- 0186US6432208B1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Aug 13, 2002·42 cites·14 claims
- 0285US8136820B2Electrostatic chuck with heater and manufacturing method thereofMORIOKA IKUHISA·Filed 2007·Granted Mar 20, 2012·16 cites·3 claims
- 0385US7848075B2Electrostatic chuck with heaterNGK INSULATORS LTD·Filed 2007·Granted Dec 7, 2010·10 cites·2 claims
- 0474US10150709B2Joined body manufacturing methodNGK INSULATORS LTD·Filed 2016·Granted Dec 11, 2018·1 cites·6 claims
- 0572US9126384B2Bonded body of ceramic member and metal member and method for manufacturing the sameNGK INSULATORS LTD·Filed 2013·Granted Sep 8, 2015·2 cites·5 claims
- 0667US6292346B1Equipment for holding a semiconductor wafer, a method for manufacturing the same, and a method for using the sameNGK INSULATORS LTD·Filed 1999·Granted Sep 18, 2001·32 cites·5 claims
- 0766US11456189B2Member for semiconductor manufacturing apparatusesNGK INSULATORS LTD·Filed 2014·Granted Sep 27, 2022·2 cites·7 claims
- 0864US8129016B2Substrate supporting memberKAWAJIRI TETSUYA·Filed 2007·Granted Mar 6, 2012·3 cites·1 claims
- 0961US7416793B2Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the sameNGK INSULATORS LTD·Filed 2004·Granted Aug 26, 2008·8 cites·22 claims
- 1055US6728091B2Electrostatic adsorption deviceNGK INSULATORS LTD·Filed 2002·Granted Apr 27, 2004·6 cites·18 claims
- 1150US2025214496A1Seat frame for vehicleNISSAN MOTOR·Filed 2022·Application pending·0 cites
- 1249US7353979B2Method of fabricating substrate placing stageNGK INSULATORS LTD·Filed 2004·Granted Apr 8, 2008·3 cites·9 claims
- 1346US2008186647A1Electrostatic chuck and method of manufacturing the sameNGK INSULATORS LTD·Filed 2008·Application pending·0 cites
- 1445US10332771B2Joined body manufacturing method and joined bodyNGK INSULATORS LTD·Filed 2016·Granted Jun 25, 2019·0 cites·9 claims
- 1544US10814436B2Joined body including ceramic member and metallic member and method for manufacturing joined bodyNGK INSULATORS LTD·Filed 2016·Granted Oct 27, 2020·0 cites·5 claims
- 1642US7067200B2Joined bodies and a method of producing the sameNGK INSULATORS LTD·Filed 2003·Granted Jun 27, 2006·0 cites·15 claims
- 1741US2007146961A1Electrostatic chuckNGK INSULATORS LTD·Filed 2006·Application pending·0 cites
- 1840US2006213900A1Electrostatic chuck and method of manufacturing electrostatic chuckNGK INSULATORS LTD·Filed 2006·Application pending·0 cites
- 1939US10037910B2Wafer holder and method for manufacturing the sameNGK INSULATORS LTD·Filed 2016·Granted Jul 31, 2018·0 cites·8 claims
- 2038US2006021705A1Substrate mounting apparatus and control method of substrate temperatureNGK INSULATORS LTD·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →