Inventor · disambiguated record
Pedro Vagos
Also filed as: VAGOS PEDRO
10 granted patents·38 citations·filing 2005–2023
86Inventor score
Top patents by PatentIndex Score
10 records- 0194US11346768B1Vortex polarimeterONTO INNOVATION INC·Filed 2020·Granted May 31, 2022·15 cites·20 claims
- 0285US10621264B2Correction of angular error of plane-of-incidence azimuth of optical metrology deviceONTO INNOVATION INC·Filed 2019·Granted Apr 14, 2020·2 cites·24 claims
- 0385US9958327B2Deconvolution to reduce the effective spot size of a spectroscopic optical metrology deviceNANOMETRICS INC·Filed 2014·Granted May 1, 2018·5 cites·42 claims
- 0484US9995689B2Optical metrology using differential fittingNANOMETRICS INC·Filed 2015·Granted Jun 12, 2018·3 cites·22 claims
- 0582US8427645B2Mueller matrix spectroscopy using chiropticVAGOS PEDRO·Filed 2011·Granted Apr 23, 2013·7 cites·15 claims
- 0680US10274367B2Deconvolution to reduce the effective spot size of a spectroscopic optical metrology deviceNANOMETRICS INC·Filed 2018·Granted Apr 30, 2019·1 cites·28 claims
- 0777US10296554B2Correction of angular error of plane-of-incidence azimuth of optical metrology deviceNANOMETRICS INC·Filed 2013·Granted May 21, 2019·2 cites·39 claims
- 0865US7410815B2Apparatus and method for non-contact assessment of a constituent in semiconductor substratesNANOMETRICS INC·Filed 2005·Granted Aug 12, 2008·2 cites·21 claims
- 0963US12092962B1Measurements of structures in presence of signal contaminationsONTO INNOVATION INC·Filed 2023·Granted Sep 17, 2024·0 cites·29 claims
- 1060US7751061B2Non-contact apparatus and method for measuring a property of a dielectric layer on a waferNANOMETRICS INC·Filed 2007·Granted Jul 6, 2010·1 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →