Inventor · disambiguated record
Chris Karlsrud
Also filed as: KARLSRUD CHRIS · KARLSRUD CHRIS E · KARLSRUD CHRIS ERICK
24 granted patents·2 pending applications·1,606 citations·filing 1990–2016
97Inventor score
Top patents by PatentIndex Score
26 records- 0196US5872633AMethods and apparatus for detecting removal of thin film layers during planarizationSPEEDFAM CORP·Filed 1997·Granted Feb 16, 1999·390 cites·17 claims
- 0295US5569062APolishing pad conditioningSPEEDFAM CORP·Filed 1995·Granted Oct 29, 1996·156 cites·10 claims
- 0395US5329732AWafer polishing method and apparatusSPEEDFAM CORP·Filed 1992·Granted Jul 19, 1994·262 cites·14 claims
- 0493US6520839B1Load and unload station for semiconductor wafersSPEEDFAM IPEC CORP·Filed 2000·Granted Feb 18, 2003·51 cites·25 claims
- 0592US6227946B1Robot assisted method of polishing, cleaning and drying workpiecesSPEEDFAM IPEC CORP·Filed 2000·Granted May 8, 2001·42 cites·14 claims
- 0692US5498199AWafer polishing method and apparatusSPEEDFAM CORP·Filed 1994·Granted Mar 12, 1996·198 cites·5 claims
- 0786US6213853B1Integral machine for polishing, cleaning, rinsing and drying workpiecesSPEEDFAM IPEC CORP·Filed 1997·Granted Apr 10, 2001·58 cites·68 claims
- 0884US6852007B1Robotic method of transferring workpieces to and from workstationsSPEEDFAM IPEC CORP·Filed 2000·Granted Feb 8, 2005·20 cites·7 claims
- 0983US5498196AWafer polishing method and apparatusSPEEDFAM CORP·Filed 1994·Granted Mar 12, 1996·72 cites·3 claims
- 1081US6350177B1Combined CMP and wafer cleaning apparatus and associated methodsSPEEDFAM IPEC CORP·Filed 2000·Granted Feb 26, 2002·17 cites·13 claims
- 1180US5989104AWorkpiece carrier with monopiece pressure plate and low gimbal pointSPEEDFAM IPEC CORP·Filed 1998·Granted Nov 23, 1999·54 cites·10 claims
- 1279US6309279B1Arrangements for wafer polishingSPEEDFAM IPEC CORP·Filed 1999·Granted Oct 30, 2001·64 cites·31 claims
- 1379US5791975ABacking padSPEEDFAM CORP·Filed 1995·Granted Aug 11, 1998·46 cites·2 claims
- 1475US5274960AUniform velocity double sided finishing machineSPEEDFAM CORP·Filed 1990·Granted Jan 4, 1994·30 cites·13 claims
- 1573US6364745B1Mapping system for semiconductor wafer cassettesSPEEDFAM IPEC CORP·Filed 2000·Granted Apr 2, 2002·10 cites·12 claims
- 1669US5975991AMethod and apparatus for processing workpieces with multiple polishing elementsSPEEDFAM IPEC CORP·Filed 1997·Granted Nov 2, 1999·30 cites·33 claims
- 1767US5954888APost-CMP wet-HF cleaning stationSPEEDFAM CORP·Filed 1998·Granted Sep 21, 1999·28 cites·15 claims
- 1866US6390897B1Cleaning station integral with polishing machine for semiconductor wafersSPEEDFAM IPEC CORP·Filed 2000·Granted May 21, 2002·6 cites·8 claims
- 1963US5123218ACircumferential pattern finishing methodSPEEDFAM CORP·Filed 1991·Granted Jun 23, 1992·19 cites·18 claims
- 2049USRE37622EWafer polishing method and apparatusSPEEDFAM IPEC CORP·Filed 1997·Granted Apr 2, 2002·12 cites·62 claims
- 2148US5791978ABearing assembly for wafer planarization carrierSPEEDFAM CORP·Filed 1996·Granted Aug 11, 1998·12 cites·15 claims
- 2243US6125861APost-CMP wet-HF cleaning stationSPEEDFAM IPEC CORP·Filed 1998·Granted Oct 3, 2000·9 cites·13 claims
- 2343US5187901ACircumferential pattern finishing machineSPEEDFAM CORP·Filed 1990·Granted Feb 23, 1993·8 cites·12 claims
- 2442US5834645AMethods and apparatus for the in-process detection of workpieces with a physical contact probeSPEEDFAM CORP·Filed 1997·Granted Nov 10, 1998·12 cites·23 claims
- 2530US2006042664A1Apparatus and method for removing a liquid from a rotating substrate surfaceHARDIKAR VISHWAS·Filed 2004·Application pending·0 cites
- 2630US2016358808A1Hybrid 200 mm/300 mm semiconductor processing apparatusesLAM RES CORP·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →