Inventor · disambiguated record
Fabio Zocchi
Also filed as: ZOCCHI FABIO · ZOCCHI FABIO E
11 granted patents·3 pending applications·59 citations·filing 2007–2013
88Inventor score
Top patents by PatentIndex Score
14 records- 0190US8258485B2Source-collector module with GIC mirror and xenon liquid EUV LPP target systemLEVESQUE RICHARD A·Filed 2010·Granted Sep 4, 2012·15 cites·20 claims
- 0284US8330131B2Source-collector module with GIC mirror and LPP EUV light sourceCEGLIO NATALE M·Filed 2010·Granted Dec 11, 2012·8 cites·15 claims
- 0378US8895946B2Source-collector modules for EUV lithography employing a GIC mirror and a LPP sourceMEDIA LARIO SRL·Filed 2013·Granted Nov 25, 2014·7 cites·19 claims
- 0477US9057962B2Source-collector module with GIC mirror and LPP EUV light sourceCEGLIO NATALE M·Filed 2012·Granted Jun 16, 2015·3 cites·11 claims
- 0573US8344339B2Source-collector module with GIC mirror and tin rod EUV LPP target systemMEDIA LARIO SRL·Filed 2010·Granted Jan 1, 2013·4 cites·11 claims
- 0672US8686381B2Source-collector module with GIC mirror and tin vapor LPP target systemLEVESQUE RICHARD·Filed 2010·Granted Apr 1, 2014·3 cites·27 claims
- 0767US8411815B2Grazing incidence collector for laser produced plasma sourcesWALLHEAD IAN·Filed 2009·Granted Apr 2, 2013·8 cites·18 claims
- 0864US8390785B2Collector optical systemZOCCHI FABIO E·Filed 2007·Granted Mar 5, 2013·7 cites·14 claims
- 0961US8746975B2Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithographyBIANUCCI GIOVANNI·Filed 2012·Granted Jun 10, 2014·2 cites·26 claims
- 1052US8050380B2Zone-optimized mirrors and optical systems using sameMEDIA LARIO SRL·Filed 2009·Granted Nov 1, 2011·0 cites·20 claims
- 1146US8594277B2Grazing incidence collector optical systems for EUV and X-ray applicationsZOCCHI FABIO·Filed 2009·Granted Nov 26, 2013·2 cites·12 claims
- 1234US2010091941A1Multi-reflection optical systems and their fabricationZOCCHI FABIO E·Filed 2007·Application pending·0 cites
- 1334US2012050707A1Source-collector module with GIC mirror and tin wire EUV LPP target systemLEVESQUE RICHARD A·Filed 2010·Application pending·0 cites
- 1433US2012050706A1Source-collector module with GIC mirror and xenon ice EUV LPP target systemLEVESQUE RICHARD A·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →