Assignee
CEGLIO NATALE M
US·3 granted patents·12 citations·filing 2010–2012
Top patents by PatentIndex Score
3 records- 0184US8330131B2Source-collector module with GIC mirror and LPP EUV light sourceCEGLIO NATALE M·Filed 2010·Granted Dec 11, 2012·8 cites·15 claims
- 0277US9057962B2Source-collector module with GIC mirror and LPP EUV light sourceCEGLIO NATALE M·Filed 2012·Granted Jun 16, 2015·3 cites·11 claims
- 0362US8587768B2EUV collector system with enhanced EUV radiation collectionCEGLIO NATALE M·Filed 2011·Granted Nov 19, 2013·1 cites·11 claims
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