Inventor · disambiguated record
Konstantin Makhratchev
Also filed as: MAKHRATCHEV KONSTANTIN
29 granted patents·1 pending application·589 citations·filing 2001–2024
96Inventor score
Files withAPPLIED MATERIALS INC20LAM RES CORP2MAKHRATCHEV KONSTANTIN2BUSCHE MATTHEW J1LUBOMIRSKY DMITRY1
Top patents by PatentIndex Score
30 records- 0198US10460916B2Real time monitoring with closed loop chucking force controlAPPLIED MATERIALS INC·Filed 2018·Granted Oct 29, 2019·45 cites·11 claims
- 0297US8941969B2Single-body electrostatic chuckAPPLIED MATERIALS INC·Filed 2012·Granted Jan 27, 2015·44 cites·20 claims
- 0397US8937800B2Electrostatic chuck with advanced RF and temperature uniformityLUBOMIRSKY DMITRY·Filed 2013·Granted Jan 20, 2015·305 cites·20 claims
- 0496US9299539B2Method and apparatus for measuring wafer bias potentialMAKHRATCHEV KONSTANTIN·Filed 2009·Granted Mar 29, 2016·44 cites·7 claims
- 0595US12334385B2Tunable temperature controlled substrate support assemblyAPPLIED MATERIALS INC·Filed 2024·Granted Jun 17, 2025·1 cites·10 claims
- 0693US9666466B2Electrostatic chuck having thermally isolated zones with minimal crosstalkAPPLIED MATERIALS INC·Filed 2014·Granted May 30, 2017·10 cites·20 claims
- 0789US6714033B1Probe for direct wafer potential measurementsLAM RES CORP·Filed 2001·Granted Mar 30, 2004·45 cites·15 claims
- 0887US10079165B2Electrostatic chuck with independent zone cooling and reduced crosstalkAPPLIED MATERIALS INC·Filed 2014·Granted Sep 18, 2018·6 cites·20 claims
- 0987US6852614B1Method of manufacturing semiconductor having group II-group VI compounds doped with nitrogenUNIV TOLEDO·Filed 2001·Granted Feb 8, 2005·57 cites·21 claims
- 1083US9281226B2Electrostatic chuck having reduced power lossMAKHRATCHEV KONSTANTIN·Filed 2013·Granted Mar 8, 2016·5 cites·16 claims
- 1182US9558981B2Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methodsAPPLIED MATERIALS INC·Filed 2014·Granted Jan 31, 2017·4 cites·15 claims
- 1281US9472435B2Tunable temperature controlled substrate support assemblyAPPLIED MATERIALS INC·Filed 2015·Granted Oct 18, 2016·2 cites·18 claims
- 1379US9622375B2Electrostatic chuck with external flow adjustments for improved temperature distributionBUSCHE MATTHEW J·Filed 2013·Granted Apr 11, 2017·5 cites·13 claims
- 1476US10403534B2Pixilated cooling, temperature controlled substrate support assemblyAPPLIED MATERIALS INC·Filed 2014·Granted Sep 3, 2019·3 cites·20 claims
- 1576US9991148B2Electrostatic chuck having thermally isolated zones with minimal crosstalkAPPLIED MATERIALS INC·Filed 2017·Granted Jun 5, 2018·1 cites·20 claims
- 1676US9520315B2Electrostatic chuck with internal flow adjustments for improved temperature distributionPARKHE VIJAY D·Filed 2013·Granted Dec 13, 2016·3 cites·20 claims
- 1773US11158526B2Temperature controlled substrate support assemblyAPPLIED MATERIALS INC·Filed 2014·Granted Oct 26, 2021·2 cites·16 claims
- 1872US10121688B2Electrostatic chuck with external flow adjustments for improved temperature distributionAPPLIED MATERIALS INC·Filed 2017·Granted Nov 6, 2018·1 cites·20 claims
- 1971US10026636B2Electrostatic chuck having reduced power lossAPPLIED MATERIALS INC·Filed 2016·Granted Jul 17, 2018·1 cites·15 claims
- 2070US12009244B2Tunable temperature controlled substrate support assemblyAPPLIED MATERIALS INC·Filed 2020·Granted Jun 11, 2024·0 cites·15 claims
- 2168US12243756B2Temperature controlled substrate support assemblyAPPLIED MATERIALS INC·Filed 2021·Granted Mar 4, 2025·0 cites·20 claims
- 2268US9948214B2High temperature electrostatic chuck with real-time heat zone regulating capabilityAPPLIED MATERIALS INC·Filed 2013·Granted Apr 17, 2018·2 cites·21 claims
- 2368US8797705B2Methods and arrangement for plasma dechuck optimization based on coupling of plasma signaling to substrate position and potentialVALCORE JR JOHN C·Filed 2009·Granted Aug 5, 2014·3 cites·20 claims
- 2462US11088005B2Electrostatic chuck having thermally isolated zones with minimal crosstalkAPPLIED MATERIALS INC·Filed 2019·Granted Aug 10, 2021·0 cites·20 claims
- 2561US10304715B2Electrostatic chuck having thermally isolated zones with minimal crosstalkAPPLIED MATERIALS INC·Filed 2018·Granted May 28, 2019·0 cites·20 claims
- 2660US10622229B2Electrostatic chuck with independent zone cooling and reduced crosstalkAPPLIED MATERIALS INC·Filed 2018·Granted Apr 14, 2020·0 cites·11 claims
- 2758US10535544B2Tunable temperature controlled substrate support assemblyAPPLIED MATERIALS INC·Filed 2016·Granted Jan 14, 2020·0 cites·11 claims
- 2855US9875923B2Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methodsAPPLIED MATERIALS INC·Filed 2016·Granted Jan 23, 2018·0 cites·19 claims
- 2949US8055489B2Method for using an RC circuit to model trapped charge in an electrostatic chuckLAM RES CORP·Filed 2008·Granted Nov 8, 2011·0 cites·17 claims
- 3040US2014049162A1Defect reduction in plasma processingTHOMAS GEORGE·Filed 2012·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →