Inventor · disambiguated record
Kengo Mizosaki
Also filed as: MIZOSAKI KENGO
8 granted patents·1 pending application·328 citations·filing 1993–2002
90Inventor score
Files withTOKYO ELECTRON LTD8
Top patents by PatentIndex Score
9 records- 0185US6443641B2Substrate process method and substrate process apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Sep 3, 2002·28 cites·7 claims
- 0281US6087632AHeat processing device with hot plate and associated reflectorTOKYO ELECTRON LTD·Filed 1999·Granted Jul 11, 2000·64 cites·17 claims
- 0380US5345639ADevice and method for scrubbing and cleaning substrateTOKYO ELECTRON LTD·Filed 1993·Granted Sep 13, 1994·67 cites·9 claims
- 0476US6261007B1Substrate process method and substrate process apparatusTOKYO ELECTRON LTD·Filed 1999·Granted Jul 17, 2001·43 cites·6 claims
- 0576US5518552AMethod for scrubbing and cleaning substrateTOKYO ELECTRON LTD·Filed 1994·Granted May 21, 1996·54 cites·10 claims
- 0674US5998766AApparatus and method for cleaning substrate surface by use of OzoneTOKYO ELECTRON LTD·Filed 1997·Granted Dec 7, 1999·27 cites·31 claims
- 0768US6451515B2Substrate treating methodTOKYO ELECTRON LTD·Filed 1999·Granted Sep 17, 2002·31 cites·10 claims
- 0846US5695562AProcessing apparatusTOKYO ELECTRON LTD·Filed 1995·Granted Dec 9, 1997·14 cites·14 claims
- 0940US2002187423A1Substrate treating methodFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →