Inventor · disambiguated record
Junichi Kageyama
Also filed as: KAGEYAMA JUNICHI
15 granted patents·2 pending applications·746 citations·filing 1981–2016
94Inventor score
Top patents by PatentIndex Score
17 records- 0197US8192901B2Glass substrate-holding toolKAGEYAMA JUNICHI·Filed 2010·Granted Jun 5, 2012·522 cites·24 claims
- 0296US4399181ACold drawn high-orientation multilayered film and process for manufacture of said filmASAHI DOW LTD·Filed 1981·Granted Aug 16, 1983·75 cites·33 claims
- 0394US9618836B2Reflective mask blank for EUV lithography, substrate with funtion film for the mask blank, and methods for their productionASAHI GLASS CO LTD·Filed 2015·Granted Apr 11, 2017·6 cites·22 claims
- 0492US4501634ACold drawn high-orientation multilayered film and process for manufacture of said filmASAHI DOW LTD·Filed 1983·Granted Feb 26, 1985·49 cites·32 claims
- 0591US8562794B2Process for producing reflective mask blank for EUV lithography and process for producing substrate with functional film for the mask blankKAGEYAMA JUNICHI·Filed 2010·Granted Oct 22, 2013·7 cites·19 claims
- 0680US4469753ACold drawn high-orientation multilayered film and process for manufacture of said filmASAHI DOW LTD·Filed 1983·Granted Sep 4, 1984·20 cites·2 claims
- 0778US4469752ACold drawn high-orientation multilayered film and process for manufacture of said filmASAHI DOW LTD·Filed 1983·Granted Sep 4, 1984·23 cites·2 claims
- 0877US8734907B2Coating of shield surfaces in deposition systemsJINDAL VIBHU·Filed 2012·Granted May 27, 2014·1 cites·17 claims
- 0976US7026542B2Cover glass for a solar battery, a method for producing the cover glass and a solar battery module using the cover glassASAHI GLASS CO LTD·Filed 2004·Granted Apr 11, 2006·16 cites·19 claims
- 1068US8734586B2Process for cleaning shield surfaces in deposition systemsJINDAL VIBHU·Filed 2012·Granted May 27, 2014·1 cites·11 claims
- 1160US4430377ACold drawn high-orientation multilayered film and process for manufacture of said filmASAHI DOW LTD·Filed 1983·Granted Feb 7, 1984·12 cites·33 claims
- 1258US4472228ACold drawn high-orientation multilayered film and process for manufacture of said filmASAHI DOW LTD·Filed 1983·Granted Sep 18, 1984·8 cites·1 claims
- 1358US2014242500A1Process For Cleaning Shield Surfaces In Deposition SystemsSEMATECH INC·Filed 2014·Application pending·0 cites
- 1458US2014242501A1Coating Of Shield Surfaces In Deposition SystemsSEMATECH INC·Filed 2014·Application pending·0 cites
- 1553US4430378ACold drawn high-orientation multilayered film and process for manufacture of said filmASAHI DOW LTD·Filed 1983·Granted Feb 7, 1984·6 cites·33 claims
- 1646US9927693B2Reflective mask blank and process for producing the reflective mask blankASAHI GLASS CO LTD·Filed 2016·Granted Mar 27, 2018·0 cites·10 claims
- 1741US9739722B2Reflective mask blank for EUV lithography, and process for its inspection and process for its productionASAHI GLASS CO LTD·Filed 2015·Granted Aug 22, 2017·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →