Inventor · disambiguated record
Seima Kato
Also filed as: KATO SEIMA
15 granted patents·4 pending applications·41 citations·filing 2004–2022
89Inventor score
Top patents by PatentIndex Score
19 records- 0183US8525982B2Refractive index distribution measuring method and refractive index distribution measuring apparatusKATO SEIMA·Filed 2011·Granted Sep 3, 2013·6 cites·11 claims
- 0283US8508725B2Refractive index distribution measuring method and apparatus using position measurement and a reference objectKATO SEIMA·Filed 2010·Granted Aug 13, 2013·6 cites·8 claims
- 0372US7283252B2Measuring method and apparatus using interference, exposure method and apparatus using the same, and device fabrication methodCANON KK·Filed 2004·Granted Oct 16, 2007·12 cites·7 claims
- 0467US8477297B2Refractive index distribution measuring method and apparatus, and method of producing optical element thereof, that use multiple transmission wavefronts of a test object immersed in at least one medium having a different refractive index from that of the test object and multiple reference transmission wavefronts of a reference object having known shape and refractive index distributionKATO SEIMA·Filed 2011·Granted Jul 2, 2013·1 cites·8 claims
- 0566US12385804B2Optical apparatus, evaluation apparatus, evaluation method, and manufacturing method of optical systemCANON KK·Filed 2022·Granted Aug 12, 2025·0 cites·18 claims
- 0666US7952726B2Measurement apparatus, exposure apparatus having the same, and device manufacturing methodCANON KK·Filed 2007·Granted May 31, 2011·2 cites·5 claims
- 0765US7443515B2Apparatus for measuring optical properties of tested optical system using interferenceCANON KK·Filed 2005·Granted Oct 28, 2008·4 cites·7 claims
- 0864US8786863B2Transmitted wavefront measuring method, refractive-index distribution measuring method, and transmitted wavefront measuring apparatus that calculate a frequency distribution and obtain a transmitted wavefront of the object based on a primary frequency spectrum in the frequency distributionKATO SEIMA·Filed 2010·Granted Jul 22, 2014·2 cites·5 claims
- 0961US8077391B2Wavefront aberration measuring method, mask, wavefront aberration measuring device, exposure apparatus, and device manufacturing methodOUCHI CHIDANE·Filed 2009·Granted Dec 13, 2011·1 cites·3 claims
- 1061US8004691B2Measuring apparatus, exposure apparatus and method, and device manufacturing methodCANON KK·Filed 2006·Granted Aug 23, 2011·3 cites·12 claims
- 1155US8472013B2Refractive index distribution measurement method and apparatus that measure transmission wavefronts of a test object immersed in different media having refractive index lower than that of the test objectKATO SEIMA·Filed 2009·Granted Jun 25, 2013·2 cites·14 claims
- 1254US8520217B2Talbot interferometer, its adjustment method, and measurement methodNAOI TOSHIYUKI·Filed 2010·Granted Aug 27, 2013·2 cites·2 claims
- 1351US9557241B2Wavefront aberration measuring method, wavefront aberration measuring apparatus and optical element manufacturing methodCANON KK·Filed 2014·Granted Jan 31, 2017·0 cites·15 claims
- 1447US2009268188A1Exposure apparatus and device manufacturing methodCANON KK·Filed 2009·Application pending·0 cites
- 1545US7474413B2Method and apparatus for analyzing interference fringeCANON KK·Filed 2006·Granted Jan 6, 2009·0 cites·11 claims
- 1641US7692799B2Measurement apparatus, exposure apparatus, and device fabrication methodCANON KK·Filed 2008·Granted Apr 6, 2010·0 cites·7 claims
- 1739US2016299066A1Refractive index measuring method, refractive index measuring apparatus, and optical element manufacturing methodCANON KK·Filed 2016·Application pending·0 cites
- 1839US2006072091A1Exposure apparatusKATO SEIMA·Filed 2005·Application pending·0 cites
- 1936US2015260605A1Refractive-index distribution measuring method, refractive-index distribution measuring apparatus, method of manufacturing optical element, and non-transitory computer-readable storage mediumCANON KK·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →